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Volumn 131, Issue 11, 2004, Pages 701-705
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Contribution of multiple emitting centers to luminescence from Si/SiO 2 multilayers with step by step thermal annealing
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Author keywords
A. Nanostructures; C. Infrared; D. Optical properties
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Indexed keywords
ANNEALING;
CHEMICAL VAPOR DEPOSITION;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
INFRARED RADIATION;
NANOSTRUCTURED MATERIALS;
OPTICAL PROPERTIES;
PHOTOLUMINESCENCE;
RAMAN SPECTROSCOPY;
SILICON;
PLASMA OXIDATION PROCESS;
THERMAL ANNEALING;
THERMAL DONORS;
MULTILAYERS;
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EID: 3943109513
PISSN: 00381098
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ssc.2004.06.031 Document Type: Article |
Times cited : (27)
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References (18)
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