Formation of confined macroporous silicon membranes on pre-defined areas on the Si substrate

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 5, 2007, Pages 1335-1339

  Pagonis, D N ^a   Nassiopoulou, A G ^a  

^a INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

MACROPOROUS SILICON MEMBRANES; MASK BORDERS; MASKING TECHNOLOGY; MESOPOROUS LAYER;

ETCHING; LITHOGRAPHY; MEMBRANES; MESOPOROUS MATERIALS; SUBSTRATES; TRENCHING;

POROUS SILICON;

EID: 34547140853     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200674328     Document Type: Article

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