Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1421-1425

  Pagonis, Dimitrios N ^a   Nassiopoulou, Androula G ^a  

^a INSTITUTE OF NANOSCIENCE AND NANOTECHNOLOGY   (Greece)

Author keywords

Free standing macroporous silicon membranes; Macroporous on nanoporous silicon; Multilayer structures of porous silicon

Indexed keywords

ANODIC OXIDATION; COMPOSITE MICROMECHANICS; DISSOLUTION; ELECTROCHEMISTRY; FILTRATION; MEMBRANES;

FREE-STANDING MACROPOROUS SILICON MEMBRANES; MACROPOROUS ON NANOPOROUS SILICON; MULTILAYER STRUCTURES OF POROUS SILICON;

POROUS SILICON;

EID: 33646019271     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.065     Document Type: Article

References (22)

1. A.G. Nassiopoulou, in: A. Vaseashta, D. Dimova-Malinovska, J.M. Marshal (Eds.), Nanostructured and Advanced Materials, NANO Science Series II. Mathematics, Physics and Chemistry, vol. 204, 2005, p. 189.
2. Lehmann V., and Foll H. J. Electrochem. Soc. 137 (1990) 653
3. Prost E.K., and Kohl P.A. J. Electrochem. Soc. 141 (1994) 1006
4. Vyatkin A., Starkov V., Tzeitlin V., Presting H., Konle J., and Konig U. J. Electrochem. Soc. 149 1 (2002) G70
5. Levy-Clement C., Lust S., Le Q.N., and Sarti D. Phys. Status solidi A 197 1 (2003) 27
6. Starkov V. Phys. Status solidi A 197 1 (2003) 22
7. Nassiopoulou A.G., and Kaltsas G. Phys. Status solidi A 182 (2000) 307
8. Kaltsas G., Nassiopoulos A.A., and Nassiopoulou A.G. IEEE Sensors Journal 2 5 (2002) 463
9. Kaltsas G., and Nassiopoulou A.G. Microelectron. Eng. 35 (1997) 397
10. Kaltsas G., and Nassiopoulou A.G. Sensors and Actuators, A 65 (1998) 175
11. Berger M.G., Dieker C., Thonissen M., Vescan L., Luth H., and Munder H. J. Phys. D 27 (1994) 1333
12. M. Thonissen, M.G. Berger, in: L.T. Canham (Ed.), Properties of Porous Silicon, Emis Datareview Series, INSPEC, IEE, UK, No. 18, 1997, p. 30.
13. Zheng J., Christophersen M., and Bergstrom P.L. Phys. Status solidi A 202 8 (2005) 1662
14. Ouyang H., Christophersen M., and Fauchet P.M. Phys. Status solidi A 202 8 (2005) 1396
15. Pagonis D.N., Nassiopoulou A.G., and Kaltsas G. J. Micromech. Microeng. 14 1-5 (2004) 793
16. Pagonis D., Kaltsas G., and Nassiopoulou A.G. Phys. Status solidi A 197 1 (2003) 241
17. Kaltsas G., Pagonis D.N., and Nassiopoulou A.G. IEEE J. MEMS 12 6 (2003) 863
18. Zhang X.G. Electrochemistry of Silicon and its Oxide (2001), Kluwer Academic/Plenum Publishers, New York p.408
19. Foll H., Christophersen M., Carstensen J., and Hasse G. Mater. Sci. Eng. R39 (2002) 93
20. Lehmann V. Thin Solid Films 225 (1995) 1
21. Cartensen J., Christophersen M., and Foll H. Mater. Sci. Eng. B 69-70 (2000) 23
22. Bettotti P., Gaburro Z., Negro L.D., and Pavesi L. Proc. Mater. Res. Soc. (2002) L.6.7.1-L.6.7.6