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Volumn 22, Issue 7, 2007, Pages 1839-1848

Further experiments and modeling for microscale compression molding of metals at elevated temperatures

Author keywords

[No Author keywords available]

Indexed keywords

HIGH-ASPECT-RATIO MICROSCALE STRUCTURE; MOLDING REPLICATION; MOLDING TEMPERATURE;

EID: 34547117145     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0252     Document Type: Article
Times cited : (17)

References (27)
  • 2
    • 0026882942 scopus 로고
    • The case for magnetically driven microactuators
    • I.J. Busch-Vishniac: The case for magnetically driven microactuators. Sens. Actuators, A 33, 207 (1992).
    • (1992) Sens. Actuators, A , vol.33 , pp. 207
    • Busch-Vishniac, I.J.1
  • 3
    • 0035276929 scopus 로고    scopus 로고
    • Fabrication of metallic heat exchangers using sacrificial polymer mandrils
    • F. Arias, S.R.J. Oliver, B. Xu, R.E. Homlin, and G.M. Whitesides: Fabrication of metallic heat exchangers using sacrificial polymer mandrils. JMEMS 10, 107 (2001).
    • (2001) JMEMS , vol.10 , pp. 107
    • Arias, F.1    Oliver, S.R.J.2    Xu, B.3    Homlin, R.E.4    Whitesides, G.M.5
  • 4
    • 10844287923 scopus 로고    scopus 로고
    • Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology
    • J.D. Williams and W. Wang: Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology. Microsystem Technol. 10, 699 (2004).
    • (2004) Microsystem Technol , vol.10 , pp. 699
    • Williams, J.D.1    Wang, W.2
  • 7
    • 0000670335 scopus 로고    scopus 로고
    • Hot embossing - The molding technique for plastic microstructures
    • M. Heckele, W. Bacher, and K.D. Muller: Hot embossing - The molding technique for plastic microstructures. Microsystem Technol. 4, 122 (1998).
    • (1998) Microsystem Technol , vol.4 , pp. 122
    • Heckele, M.1    Bacher, W.2    Muller, K.D.3
  • 8
    • 3042597834 scopus 로고    scopus 로고
    • High-temperature instrumented microscale compression molding of Pb
    • D.M. Cao, W.J. Meng, and K.W. Kelly: High-temperature instrumented microscale compression molding of Pb. Microsystem Technol. 10, 323 (2004).
    • (2004) Microsystem Technol , vol.10 , pp. 323
    • Cao, D.M.1    Meng, W.J.2    Kelly, K.W.3
  • 10
    • 9944259014 scopus 로고    scopus 로고
    • Microscale compression molding of Al with surface engineered LiGA inserts
    • D.M. Cao and W.J. Meng: Microscale compression molding of Al with surface engineered LiGA inserts. Microsystem Technol. 10, 662 (2004).
    • (2004) Microsystem Technol , vol.10 , pp. 662
    • Cao, D.M.1    Meng, W.J.2
  • 11
    • 33847277048 scopus 로고    scopus 로고
    • Fabrication of high-aspect-ratio microscale Ta mold inserts with microelectrical-discharge-machining
    • D.M. Cao, J. Jiang, W.J. Meng, J.C. Jiang, and W. Wang: Fabrication of high-aspect-ratio microscale Ta mold inserts with microelectrical-discharge-machining. Microsystem Technol. 13, 503 (2007).
    • (2007) Microsystem Technol , vol.13 , pp. 503
    • Cao, D.M.1    Jiang, J.2    Meng, W.J.3    Jiang, J.C.4    Wang, W.5
  • 12
    • 0035507796 scopus 로고    scopus 로고
    • Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applications
    • D.M. Cao, T. Wang, B. Feng, W.J. Meng, and K.W. Kelly: Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applications. Thin Solid Films 398/399, 553 (2001).
    • (2001) Thin Solid Films , vol.398-399 , pp. 553
    • Cao, D.M.1    Wang, T.2    Feng, B.3    Meng, W.J.4    Kelly, K.W.5
  • 13
    • 0038297569 scopus 로고    scopus 로고
    • Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics
    • D.M. Cao, W.J. Meng, S.J. Simko, G.L. Doll, T. Wang, and K.W. Kelly: Conformal deposition of Ti-C:H coatings over high-aspect-ratio micro-scale structures and tribological characteristics. Thin Solid Films 429, 46 (2003).
    • (2003) Thin Solid Films , vol.429 , pp. 46
    • Cao, D.M.1    Meng, W.J.2    Simko, S.J.3    Doll, G.L.4    Wang, T.5    Kelly, K.W.6
  • 14
    • 33745215629 scopus 로고    scopus 로고
    • Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM
    • D.M. Cao, J. Jiang, R. Yang, and W.J. Meng: Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM. Microsystem Technol. 12, 839 (2006).
    • (2006) Microsystem Technol , vol.12 , pp. 839
    • Cao, D.M.1    Jiang, J.2    Yang, R.3    Meng, W.J.4
  • 15
    • 22144437069 scopus 로고    scopus 로고
    • Stresses during micromolding of metals at elevated temperatures: Pilot experiments and a simple model
    • W.J. Meng, D.M. Cao, and G.B. Sinclair: Stresses during micromolding of metals at elevated temperatures: Pilot experiments and a simple model. J. Mater. Res. 20, 161 (2005).
    • (2005) J. Mater. Res , vol.20 , pp. 161
    • Meng, W.J.1    Cao, D.M.2    Sinclair, G.B.3
  • 16
    • 34547114123 scopus 로고
    • 9th ed, ASM, Metals Park, OH
    • ASM Metals Handbook, 9th ed. (ASM, Metals Park, OH 1979), Vol. 2, p. 799.
    • (1979) ASM Metals Handbook , vol.2 , pp. 799
  • 17
    • 33646392482 scopus 로고    scopus 로고
    • D.M. Cao, J. Jiang, and W.J. Meng: Metal micromolding with surface engineered inserts, in Surface Engineering for Manufacturing Applications, edited by S.J. Bull, P.R. Chalker, S-C. Chen, W.J. Meng, and R. Maboudian (Mater. Res. Soc. Symp. Proc. 890, Warrendale, PA, 2006), p. 99.
    • D.M. Cao, J. Jiang, and W.J. Meng: Metal micromolding with surface engineered inserts, in Surface Engineering for Manufacturing Applications, edited by S.J. Bull, P.R. Chalker, S-C. Chen, W.J. Meng, and R. Maboudian (Mater. Res. Soc. Symp. Proc. 890, Warrendale, PA, 2006), p. 99.
  • 19
    • 0021979674 scopus 로고
    • Quasi-static normal indentation of an elasto-plastic half-space by a rigid sphere-II: Results
    • G.B. Sinclair, P.S. Follansbee, and K.L. Johnson: Quasi-static normal indentation of an elasto-plastic half-space by a rigid sphere-II: Results. Int. J. Solids Struct. 21, 865 (1985).
    • (1985) Int. J. Solids Struct , vol.21 , pp. 865
    • Sinclair, G.B.1    Follansbee, P.S.2    Johnson, K.L.3
  • 20
    • 34547133138 scopus 로고    scopus 로고
    • J. Jiang, G.B. Sinclair, and W.J. Meng: Preliminary finite element analyses of the elasto-plastic response of substrates indented by periodic arrays of smooth strip punches, Report ME-MA2-06, Mechanical Engineering Department (Louisiana State University, Baton Rouge, LA, 2006).
    • J. Jiang, G.B. Sinclair, and W.J. Meng: Preliminary finite element analyses of the elasto-plastic response of substrates indented by periodic arrays of smooth strip punches, Report ME-MA2-06, Mechanical Engineering Department (Louisiana State University, Baton Rouge, LA, 2006).
  • 21
    • 34547096863 scopus 로고    scopus 로고
    • ANSYS Advanced Analysis Techniques, Revision 10.0 (ANSYS Inc., Cannonsburg, PA, 2006).
    • ANSYS Advanced Analysis Techniques, Revision 10.0 (ANSYS Inc., Cannonsburg, PA, 2006).
  • 23
    • 36849133186 scopus 로고
    • Theory of steady-state creep based on dislocation climb
    • J. Weertman: Theory of steady-state creep based on dislocation climb. J. Appl. Phys. 26(10), 1213 (1955).
    • (1955) J. Appl. Phys , vol.26 , Issue.10 , pp. 1213
    • Weertman, J.1
  • 25
    • 0012624963 scopus 로고
    • Creep of polycrystalline aluminum as determined from strain rate tests
    • J. Weertman: Creep of polycrystalline aluminum as determined from strain rate tests. J. Mech. Phys. Solids 4, 230 (1956).
    • (1956) J. Mech. Phys. Solids , vol.4 , pp. 230
    • Weertman, J.1


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