Fabrication of high-aspect-ratio microscale Ta mold inserts with micro electrical discharge machining

Microsystem Technologies

Volumn 13, Issue 5-6, 2007, Pages 503-510

  Cao, D M ^a   Jiang, J ^a   Meng, W J ^a   Jiang, J C ^a   Wang, W ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; ELECTRIC DISCHARGE MACHINING; ELECTROLYTIC POLISHING; HYDROGENATION; MICROSTRUCTURE; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON COATINGS; MICROSCALE STRUCTURES; SURFACE LAYERS;

MOLDS;

EID: 33847277048     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0198-8     Document Type: Article

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