Metal micromolding with surface engineered inserts

Materials Research Society Symposium Proceedings

Volumn 890, Issue , 2006, Pages 99-105

  Cuo, D M ^a   Jiang, J ^a   Meng, W J ^a  

^a Louisiana State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS HYDROGENATED CARBON; LIGA TECHNIQUE; METAL MICROMOLDING;

AMORPHOUS MATERIALS; ASPECT RATIO; CARBON; DIE CASTING INSERTS; ELECTROLYTIC POLISHING; HYDROGENATION; MICROSTRUCTURE; POLYMERS; SILICON NITRIDE;

METAL MOLDING;

EID: 33646392482     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (23)

1. R. L. Webb, Transactions of the ASME, J. Heat Transfer 127, 2 (2005).
2. M. Madou, Fundamentals of Microfabrication (CRC Press, Boca Raton, Florida, 2000).
3. M. Heckele, W. Bacher, K. D. Muller, Microsystem Technologies 4, 122 (1998).
4. D. M. Cao, J. Jiang, W. J. Meng, J. C. Jiang, W. Wang, Fabrication of high-aspect-ratio microscale Ta mold inserts with micro-electrical-discharge- machining, Microsystem Technologies, submitted (2005).
5. D. M. Cao, J. Jiang, R. Yang, W. J. Meng, Fabrication of high-aspect-ratio microscale mold inserts by parallel uEDM, Microsystem Technologies, submitted (2005).
6. W. J. Meng, T. J. Curtis, J. Electronic Materials 26, 1297 (1997).
7. W. J. Meng, T. J. Curtis, L. E. Rehn, P. M. Baldo, Surf. Coat. Technol. 120/121, 206 (1999).
8. D. M. Cao, T. Wang, B. Feng, W. J. Meng, K. W. Kelly, Thin Solid Films 398/399, 553 (2001).
9. D. M. Cao, W. J. Meng, S. J. Simko, G. L. Doll, T. Wang, K. W. Kelly, Thin Solid Films 429, 46 (2003).
10. W. J. Meng, R. C. Tittsworth, J. C. Jiang, B. Fcng, D. M. Cao, K. Winkler, V. Palshin, J. Appl. Phys., 88, 2415 (2000).
11. D. M. Cao, B. Feng, W. J. Meng, L. E. Rehn, P. M. Baldo, M. M. Khonsari, Appl. Phys. Lett. 79, 329 (2001).
12. B. Shi, W. J. Meng, L. E. Rehn, P. M. Baldo, Appl. Phys. Lett. 81, 352 (2002).
13. W. J. Meng, X. D. Zhang, B. Shi, R. C. Titlsworth, L. E. Rehn, P. M. Baldo, J. Mater. Res. 17(10), 2628 (2002).
14. W. J. Meng, X. D. Zhang, B. Shi, J. C. Jiang, L. E. Rehn, P. M. Baldo, R. C. Tittsworth, Surf. Coat. Technol. 163/164, 251 (2003).
15. X. D. Zhang, W. J. Meng, W. Wang, L. E. Rehn, P. M. Baldo, R. D. Evans, Surf. Coat. Technol. 177/178, 325-333 (2004).
16. D. M. Cao, D. Guidry, W. J. Meng, K. W. Kelly, Microsystem Technologies 9, 559 (2003).
17. D. M. Cao, W. J. Meng, K. W. Kelly, Microsystem Technologies 10, 323 (2004).
18. D. M. Cao, W. J. Meng, Microsystem Technologies 10, 662 (2004).
19. D. M. Cao, J. Jiang, W. J. Meng, G. B. Sinclair, Metal micromolding: further experiments and preliminary finite element analysis, Microsystem Technologies, submitted (2005).
20. Smithells Metals Reference Book, edited by E. A. Brandes and B. B. Brook, Butterworth-Heinemann, Oxford (1998).
21. W. J. Meng, Crystal structure, mechanical properties, thermal properties, and refractive index of AlN, in Properties of Group III Nitrides, edited by J. H. Edgar, INSPEC, the Institution of Electrical Engineers, EMIS Data Reviews Series No. 11, London, 1994, p.22.
22. R. Griessen, T. Riesterer, in Hydrogen in Intermetallic Compounds I, edited by L. Schlapbach, Springer-Verlag, Berlin, 1988, p. 219.
23. C. A. Handwerker, M. D. Vaudin, U. R. Kattner, D. J. Lee, Interface reactions and phase stability in the Al-SiC system, in Metal-Ceramic Interfaces, Acta Scripta Metallurgica Proceeding Series Vol. 4, edited by M. Ruhle, A. G. Evans, M. F. Ashby, J. P. Hirth, Pergamon Press, Oxford, 1990, p. 129.