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Volumn 108, Issue 28, 2004, Pages 9656-9664

Nanostructure of fluorocarbon films deposited on polystyrene from hyperthermal C3F5+ ions

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARRIER CONCENTRATION; COMPUTER SIMULATION; CROSSLINKING; DEPOSITION; ETCHING; FLUOROCARBONS; ION BEAMS; MOLECULAR DYNAMICS; RADIATION DAMAGE; SURFACE REACTIONS; SURFACE ROUGHNESS; THIN FILMS;

EID: 3442890233     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp036129n     Document Type: Article
Times cited : (25)

References (26)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.