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Volumn 74, Issue 2, 2002, Pages 317-323
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Surface modification and patterning using low-energy ion beams: Si-O bond formation at the vacuum/adsorbate interface
a a b c c a |
Author keywords
[No Author keywords available]
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Indexed keywords
BOND FORMATION;
ADSORBENTS;
CHEMICAL BONDS;
ETHERS;
ION BEAMS;
MASS SPECTROMETERS;
MONOLAYERS;
SULFUR COMPOUNDS;
SURFACE TREATMENT;
VACUUM;
X RAY SPECTROSCOPY;
CHEMICAL ANALYSIS;
OXYGEN;
SILICON;
ARTICLE;
CHEMICAL BOND;
CHEMICAL INTERACTION;
CHEMICAL MODIFICATION;
LOW ENERGY RADIATION;
MASS SPECTROMETRY;
SURFACE PROPERTY;
VACUUM;
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EID: 0037080307
PISSN: 00032700
EISSN: None
Source Type: Journal
DOI: 10.1021/ac010928p Document Type: Article |
Times cited : (37)
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References (32)
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