Quantification of topographic structure by scanning probe microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1483-1493

  Kiely, James D ^a   Bonnell, Dawn A ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALCULATIONS; FOURIER TRANSFORMS; IMAGE PROCESSING; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SCANNING TUNNELING MICROSCOPY; SINGLE CRYSTALS; SURFACE ROUGHNESS; VARIATIONAL TECHNIQUES;

POWER SPECTRAL DENSITY; ROOT MEAN SQUARE ROUGHNESS; SCANNING PROBE MICROSCOPY; SILICON FRACTURE SURFACES; TOPOGRAPHIC STRUCTURE;

SURFACE STRUCTURE;

EID: 0031187276     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589480     Document Type: Article

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