Effect of oxygen ion implantation in gallium nitride

MRS Internet Journal of Nitride Semiconductor Research

Volumn 4, Issue SUPPL. 1, 1999, Pages

  Jiang, W ^a   Weber, W J ^a   Thevuthasan, S ^a   Exarhos, G J ^a   Bozlee, B J ^b  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b Universiry of Great Falls ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHIZATION; ANNEALING; COMPUTER SIMULATION; CRYSTAL DEFECTS; EPITAXIAL GROWTH; HELIUM; HIGH TEMPERATURE OPERATIONS; INTEGRATION; ION IMPLANTATION; METALLORGANIC VAPOR PHASE EPITAXY; OXYGEN; PERTURBATION TECHNIQUES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SINGLE CRYSTALS; X RAY DIFFRACTION;

CHANNELING GEOMETRY; ION CHANNELING; ION FLUENCE INTEGRATION; SUBLATTICES;

GALLIUM NITRIDE;

EID: 3442881715     PISSN: 10925783     EISSN: None     Source Type: Journal    
DOI: 10.1557/s109257830000315x     Document Type: Conference Paper

References (18)

1. S. Nakamura, MRS Bulletin 23 (5), 37 (1998).
2. M.S. Shur, in Power Semiconductor Materials and Devices, edited by S.J. Pearton, R.J. Shul, E. Wolfgang, F. Ren, and S. Tenconi (Mater. Res. Soc. Proc. 483, Warrendale, PA, 1998) pp. 15-26.
3. J.C. Zolper, R.G. Wilson, S.J. Pearton, R.A. Stall, Appl. Phys. Lett. 68, 1945 (1996).
4. H.H. Tan, J.S. Williams, J. Zou, D.J.H. Cockayne, S.J. Pearton, R.A. Stall, Appl. Phys. Lett. 69, 2364 (1996).
5. J.C. Zolper, M.H. Crawford, J.S. Williams, H.H. Tan, R.A. Stall, Nucl. Instrum. Methods in Phys. Res. B 127/128, 467 (1997).
6. B. Mensching, C. Liu, B. Rauschenbach, K. Kornitzer, W. Ritter, Mater. Sci. and Eng. B 50, 105 (1997).
7. C. Liu, B. Mensching, K. Volz, B. Rauschenbach, Appl. Phys. Lett. 71, 2313 (1997).
8. B.-C. Chung and M. Gershenzon, J. Appl. Phys. 72, 651 (1992).
9. W. Jiang, W.J. Weber, S. Thevuthasan, D.E. McCready, Surf. Interface Anal. (1998), in press.
10. W. Jiang, W.J. Weber, S. Thevuthasan, D.E. McCready, Nucl. Instrum. Methods in Phys. Res. B 143, 333 (1998).
11. C. Liu, B. Mensching, M. Zeitler, K. Volz, B. Rauschenbach, Phys. Rev. B 57, 2530 (1998).
12. W. Jiang, W.J. Weber, S. Thevuthasan, D.E. McCready, Nucl. Instrum. Methods in Phys. Res. B, January, (1999), in press.
13. W. Jiang, W.J. Weber, S. Thevuthasan, D.E. McCready, J. Nucl. Mater. 257, 295 (1998).
14. W.J. Weber, L.M. Wang, N. Yu, Nucl. Instrum. Methods in Phys. Res. B 116, 322 (1996).
15. M.L. Swanson, in Handbook of Modern Ion Beam Analysis, edited by J.R. Tesmer and M. Nastasi (Materials Research Society, Pittsburgh, PA, 1995) p. 258.
16. W. Jiang, W.J. Weber, S. Thevuthasan, submitted to 1998 MRS Fall Meeting, Symposium N, (1998).
17. W.K. Chu, J.W. Mayer, M.-A. Nicolet, Backscattering Spectrometry (Academic Press, 1978) pp. 269-271.
18. C. Liu, A. Wenzel, K. Volz, B. Rauschenbach, Nucl. Instrum. Methods in Phys. Res. B, January, (1999), in press.