Deposition of n-type nanocrystalline SiC films and current transport mechanisms in nanocrystalline SiC/crystalline Si heterojunctions

Solid State Communications

Volumn 143, Issue 4-5, 2007, Pages 228-231

  Yu, Wei ^a   Wang, Chun Sheng ^a   Lu, Wan Bing ^a   Cui, Shuang Kui ^a  

^a HEBEI UNIVERSITY   (China)

Author keywords

A. Heterojunctions; A. Surfaces and interfaces; D. Electronic transport

Indexed keywords

BIAS VOLTAGE; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; ELECTRON TUNNELING; HETEROJUNCTIONS; NANOCRYSTALLINE SILICON; SEMICONDUCTOR DOPING;

CURRENT TRANSPORT MECHANISMS; RECOMBINATION-TUNNELING MECHANISM; SI HETEROJUNCTIONS; THERMAL EMISSION;

THIN FILMS;

EID: 34250800840     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ssc.2007.05.015     Document Type: Article

References (19)

1. Matsumoto Y., Hirata G., and Takaura H. J. Appl. Phys. 67 (1990) 6538
2. Caputo D., De Cesare G., Irrera F., and Palma F. IEEE Trans. Electron Devices 43 (1996) 135
3. Chen Y.A., Chiou C.F., and Chang C.Y. IEEE Trans. Electron Devices 44 (1997) 1360
4. Nagasawa H., Kawahara T., and Yagi K. Mater. Sci. Forum 319 (2002) 389
5. Zolper J.C., and Skowronski M. Mater. Res. Soc. 30 (2005) 4
6. Boo J.H., Lee S.B., and Yu K.S. Surf. Coat. Technol. 131 (2000) 147
7. Kerdiles S., Berthelot A., and Rizka R. Appl. Phys. Lett. 80 (2002) 3772
8. Wu X.L., Fan J.Y., and Qiu T. Phys. Rev. Lett. 94 (2005) 026102
9. Yu W., Wang B.-z., and Lu W.-b. Chin. Phys. Lett. 21 (2004) 1320
10. Pereyra I., and Fantini M.C.A. J. Appl. Phys. 84 (1998) 2371
11. Kerdiles S., Berthelot A., Gourbilleau F., and Rizk R. Appl. Phys. Lett. 76 (2000) 2373
12. Cullity B.D. Elements of X-Ray Diffraction. 2nd edition (1978), Addison-Wesley, Reading, MA p. 284
13. Defives D., Durnd O., and Meyer F. Microelectron. Eng. 55 (2001) 369
14. Yu L.S. Semiconductor Heterojunction Physics (1990), Science Press, Beijing (Chapter 4) (in Chinese)
15. Gangyi X., and Tianmin W. Semicond. Sci. Technol. 15 (2000) 613
16. Sze S.M. Physics of Semiconductor Devices. 2nd edition (1981), Wiley-Interscience, NewYork (Chapter 5)
17. Mnatssakanov T.T., and Levinsthtein E.M. J. Appl. Phys. 93 (2003) 1095
18. Zhang Y.-x., Sun G.-s., and Wang L. Chin. J. Semicond. 25 (2004) 1091
19. Lysenko V.S., and Tyagulski I.P. Semicond. Phys. Quantum Electron. Optoelectron. 3 (2000) 330