Groove depth dependence of IR transmission spectra through silicon gratings: Experiment versus theory

Infrared Physics and Technology

Volumn 41, Issue 3, 2000, Pages 149-154

  Hava, Shlomo ^a   Auslender, Mark ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DIFFRACTION GRATINGS; ELECTROMAGNETIC FIELD THEORY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MICROELECTRONIC PROCESSING; MICROMACHINING; SILICON WAFERS;

GROOVE DEPTHS; GROOVE WIDTHS;

INFRARED TRANSMISSION;

EID: 0034207892     PISSN: 13504495     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4495(99)00057-2     Document Type: Article

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