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Volumn 20, Issue , 2006, Pages 15082-15093

A family of micromachined wall hot-wire sensors on polyimide foil for measurement on aerodynamic surfaces

Author keywords

[No Author keywords available]

Indexed keywords

AERODYNAMICS; ANEMOMETERS; GEOMETRY; MICROMACHINING; NICKEL; POLYIMIDES; RESISTORS; THIN FILMS;

EID: 34250695620     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2006-1244     Document Type: Conference Paper
Times cited : (1)

References (25)
  • 1
    • 0002989524 scopus 로고
    • The Measurement of Wall Shear Stress
    • Advances in Fluid Mechanics Measurements, edited by M. Gad-el-Hak, Springer Verlag, Berlin
    • Haritonidis, J. H., "The Measurement of Wall Shear Stress," Advances in Fluid Mechanics Measurements, edited by M. Gad-el-Hak, Lecture Notes in Engineering, Springer Verlag, Berlin, 1989, pp. 229-261
    • (1989) Lecture Notes in Engineering , pp. 229-261
    • Haritonidis, J.H.1
  • 2
    • 0006272701 scopus 로고    scopus 로고
    • MEMS-Based Active Drag Reduction in Turbulent Boundary Layers
    • edited by H. Helvajian, The Aerospace Press, El Segundo
    • T. Tsao et al., "MEMS-Based Active Drag Reduction in Turbulent Boundary Layers," Microengineeing Aerospace Systems, edited by H. Helvajian, The Aerospace Press, El Segundo, 1999, p. 553-580
    • (1999) Microengineeing Aerospace Systems , pp. 553-580
    • Tsao, T.1
  • 3
    • 0003446218 scopus 로고    scopus 로고
    • Cambridge University Press
    • M.Gad-el-Hak, Flow Control, Cambridge University Press, 2000, p. XIII
    • (2000) Flow Control
    • Gad-el-Hak, M.1
  • 4
    • 0035335924 scopus 로고    scopus 로고
    • Dynamic Calibration of a Shear-Stress Sensor Using Stokes-Layer Excitation
    • May
    • M. Sheplak, A. Padmanabhan, M. A. Schmidt, K. S. Breuer, "Dynamic Calibration of a Shear-Stress Sensor Using Stokes-Layer Excitation", AIAA Journal, Vol. 39, No. 5, May 2001
    • (2001) AIAA Journal , vol.39 , Issue.5
    • Sheplak, M.1    Padmanabhan, A.2    Schmidt, M.A.3    Breuer, K.S.4
  • 6
    • 0033076350 scopus 로고    scopus 로고
    • MEMS Applications in Turbulence and Flow Control
    • L. Löfdahl, M. Gad-el-Hak, "MEMS Applications in Turbulence and Flow Control," Progress in Aerospace Sciences, No. 35, 1999, pp. 101-203
    • (1999) Progress in Aerospace Sciences , Issue.35 , pp. 101-203
    • Löfdahl, L.1    Gad-el-Hak, M.2
  • 7
    • 34250723507 scopus 로고    scopus 로고
    • New Developments in Surface Flow Sensor Technology within the Framework of AEROMEMS
    • O. Burkhardt, U. Dinata, C. Warsop, W. Nitsche, "New Developments in Surface Flow Sensor Technology within the Framework of AEROMEMS," Notes on Numerical Fluid Mechanics, Vol. 76, 2001, pp. 207-217
    • (2001) Notes on Numerical Fluid Mechanics , vol.76 , pp. 207-217
    • Burkhardt, O.1    Dinata, U.2    Warsop, C.3    Nitsche, W.4
  • 8
    • 0035442555 scopus 로고    scopus 로고
    • The Surface Hot Wire as a Means of Measuring Mean and Fluctuating Wall Shear Stress
    • D. Sturzebecher, S. Anders, W. Nitsche, "The Surface Hot Wire as a Means of Measuring Mean and Fluctuating Wall Shear Stress," Experiments in Fluids, No, 31, 2001, pp. 294-301
    • (2001) Experiments in Fluids , Issue.31 , pp. 294-301
    • Sturzebecher, D.1    Anders, S.2    Nitsche, W.3
  • 14
    • 0026390460 scopus 로고
    • A Micromachined, Silicon Mass-Air-Flow Sensor for Automotive Applications
    • San Francisco, CA
    • C. H. Stephan, M. Zanini, "A Micromachined, Silicon Mass-Air-Flow Sensor for Automotive Applications," Digest of Technical Papers Transducers'91, San Francisco, CA, 1991, pp.30-33
    • (1991) Digest of Technical Papers Transducers'91 , pp. 30-33
    • Stephan, C.H.1    Zanini, M.2
  • 16
    • 0024479926 scopus 로고
    • Applications of Polyimide Films to the Electrical and Electronic Industries in Japan
    • E. Sugimoto, "Applications of Polyimide Films to the Electrical and Electronic Industries in Japan," IEEE Electrical Insulation Magazine, Vol. 5, No. 1, 1989, pp. 15-23
    • (1989) IEEE Electrical Insulation Magazine , vol.5 , Issue.1 , pp. 15-23
    • Sugimoto, E.1
  • 17
    • 0032123910 scopus 로고    scopus 로고
    • Effects of epitaxial lift-off on the DC, RF, and thermal properties of MESFET's on various host materials
    • T. Morf, C. Biber, W. Bachtold, "Effects of epitaxial lift-off on the DC, RF, and thermal properties of MESFET's on various host materials," IEEE Transactions on Electron Devices, Vol. 45 No. 7, 1998, pp. 1407-1413
    • (1998) IEEE Transactions on Electron Devices , vol.45 , Issue.7 , pp. 1407-1413
    • Morf, T.1    Biber, C.2    Bachtold, W.3
  • 18
    • 36149005932 scopus 로고
    • Thermal Conductivity of Silicon and Germanium from 3°K to the Melting Point
    • C. J. Glassbrenner, G. A. Slack, "Thermal Conductivity of Silicon and Germanium from 3°K to the Melting Point," Physical Review, Vol. 134 No. 4A, 1964, pp. A1058-A1069
    • (1964) Physical Review , vol.134 , Issue.4 A
    • Glassbrenner, C.J.1    Slack, G.A.2
  • 19
    • 0031094212 scopus 로고    scopus 로고
    • Thermal Characterization of Surface-Micromachined Silicon Nitride Membranes for Thermal Infrared Detectors
    • March
    • P, Eriksson, J. Y. Andersson, and G. Stemme, "Thermal Characterization of Surface-Micromachined Silicon Nitride Membranes for Thermal Infrared Detectors," Journal of Mircoelectromechnical Systems, Vol. 6, No. 1, March 1997, pp. 55-61
    • (1997) Journal of Mircoelectromechnical Systems , vol.6 , Issue.1 , pp. 55-61
    • Eriksson, P.1    Andersson, J.Y.2    Stemme, G.3
  • 20
    • 0036602755 scopus 로고    scopus 로고
    • Characterization of a Silicon-Micromachined Thermal Shear-Stress Sensor
    • June
    • M. Sheplak, V. Chandrasekaran, A, Cain, T. Nishida, L. N. Cattafesta, "Characterization of a Silicon-Micromachined Thermal Shear-Stress Sensor," AIAA Journal, Vol. 40, No. 6, June 2002, pp. 1099-1104
    • (2002) AIAA Journal , vol.40 , Issue.6 , pp. 1099-1104
    • Sheplak, M.1    Chandrasekaran, V.2    Cain, A.3    Nishida, T.4    Cattafesta, L.N.5
  • 21
    • 34250706481 scopus 로고    scopus 로고
    • Bulk Micromachining of Polyimide for AeroMEMS Flowsensors Using Reactive Ion Etching
    • Barcelona, Spain
    • U. Buder, J.-P. von Klitzing, E. Obermeier, "Bulk Micromachining of Polyimide for AeroMEMS Flowsensors Using Reactive Ion Etching," Proceedings Eurosensors XIX, Barcelona, Spain, 2005, MC 11
    • (2005) Proceedings Eurosensors XIX , vol.1100 , pp. 11
    • Buder, U.1    von Klitzing, J.-P.2    Obermeier, E.3
  • 22
    • 0035605866 scopus 로고    scopus 로고
    • ++ Silicon Microstructures Using Ion Implantation and Boron Etch-Stop
    • ++ Silicon Microstructures Using Ion Implantation and Boron Etch-Stop," Journal of Microelectromechanical Systems, Vol. 10, No. 4, 2001, pp. 532-537
    • (2001) Journal of Microelectromechanical Systems , vol.10 , Issue.4 , pp. 532-537
    • Huang, C.1    Najafi, K.2
  • 23
    • 34249803108 scopus 로고
    • Electrical Properties of Vacuum Deposited Nickel Films
    • C. Reale, "Electrical Properties of Vacuum Deposited Nickel Films," Physics Letters, Vol. 24A, No. 3, 1967, pp. 145-146
    • (1967) Physics Letters , vol.24 A , Issue.3 , pp. 145-146
    • Reale, C.1
  • 24
    • 34250763897 scopus 로고
    • Rugged Film Resistor Thermometer for the Measurement of Surface Temperatures
    • R. E. Thun, G. F. Caudle, E. R. Pasciutti, "Rugged Film Resistor Thermometer for the Measurement of Surface Temperatures," The Review of Scientific Instruments, Vol. 31, No. 4, 1960, pp. 446-449
    • (1960) The Review of Scientific Instruments , vol.31 , Issue.4 , pp. 446-449
    • Thun, R.E.1    Caudle, G.F.2    Pasciutti, E.R.3
  • 25
    • 0017518913 scopus 로고
    • Frequency Response and Electronic Testing for Constant-Temperature Hot-Wire Anemometers
    • P.Freymuth, "Frequency Response and Electronic Testing for Constant-Temperature Hot-Wire Anemometers", Journal of Physics E, Vol. 10, 1977, pp. 705-710
    • (1977) Journal of Physics E , vol.10 , pp. 705-710
    • Freymuth, P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.