AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 545-548

  Buder, U ^a   Berns, A ^a   Obermeier, E ^a   Petz, R ^a   Nitsche, W ^a  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; POLYIMIDES; REACTIVE ION ETCHING; SILICON SENSORS; THERMAL CONDUCTIVITY; THIN FILMS;

AERODYNAMIC SURFACES; BASE MATERIALS; HIGH FREQUENCY FLUCTUATIONS;

ANEMOMETERS;

EID: 33847262069     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597756     Document Type: Conference Paper

References (8)

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