Dynamic calibration of a shear-stress sensor using Stokes-layer excitation

AIAA Journal

Volumn 39, Issue 5, 2001, Pages 819-823

  Sheplak, Mark ^a,d   Padmanabhan, Aravind ^b,d   Schmidt, Martin A ^d   Breuer, Kenneth S ^c,d  

^a UNIVERSITY OF FLORIDA   (United States)

^b HONEYWELL TECHNOLOGY CENTER   (United States)

^c Brown University   (United States)

^d MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; BANDWIDTH; DYNAMIC RESPONSE; FREQUENCY RESPONSE; HEAT TRANSFER; OSCILLATIONS; SHEAR STRESS;

SHEAR-STRESS SENSORS; STOKES-LAYER EXCITATION;

SENSORS;

EID: 0035335924     PISSN: 00011452     EISSN: None     Source Type: Journal    
DOI: 10.2514/2.1415     Document Type: Article

References (32)

1. Haritonidis, J. H., "The Measurement of Wall Shear Stress," Advances in Fluid Mechanics Measurements, Springer-Verlag, New York, 1989, pp. 229-261.
2. Breuer, K. S., "Active Control of Wall Pressure Fluctuations in a Turbulent Boundary Layer," Fluid Engineering Div. Vol. 168, American Society of Mechanical Engineers, New York, 1993, pp. 39-48.
3. Schmidt, M. A., Howe, R. T., Senturia, S. D., and Haritonidis, J. H., "Design and Calibration of a Microfabricated Floating-Element Shear-Stress Sensor," Transactions of Electron Devices, Vol. ED-35, 1988, pp. 750-757.
4. Ng, K., Shajii, J., and Schmidt, M. A., "A Liquid Shear-Stress Sensor Using Wafer-Bonding Technology," Journal of Microelectromechanical Systems, Vol. 1, No. 2, 1992, pp. 89-94.
5. Goldberg, H. D., Breuer, K. S., and Schmidt, M. A., "A Silicon Wafer-Bonding Technology for Microfabricated Shear-Stress Sensors with Backside Contacts," Proceedings of the Solid-State Sens. Actuator Workshop, Transducer Research Foundation, Cleveland, OH, 1994, pp. 111-115.
6. Padmanabhan, A., Goldberg, H. D., Schmidt, M. A., and Breuer, K. S., "A Wafer-Bonded Floating-Element Shear-Stress Microsensor with Optical Position Sensing by Photodiodes," Journal of Microelectromechanical Systems, Vol. 5, No. 4, 1996, pp. 307-315.
7. Padmanabhan, A., Goldberg, H. D., Schmidt, M. A., and Breuer, K. S., "A Silicon Micromachined Sensor for Shear Stress Measurements in Aerodynamic Flows," AIAA Paper 96-0422, Jan. 1996.
8. Padmanabhan, A., "Silicon Micromachined Sensors and Sensor Arrays for Shear Stress Measurements in Aerodynamic Flows," Ph.D. Dissertation, Dept. of Mechanical Engineering, Massachusetts Inst. of Technology, Cambridge, MA, Feb. 1997.
9. Padmanabhan, A., Sheplak, M., Breuer, K. S., and Schmidt, M. A., "Micromachined Sensors for Static and Dynamic Shear Stress Measurements in Aerodynamic Flows," Proceedings of Transducers '97, Inst. of Electrical and Electronics Engineers, Piscataway, NJ, 1997, pp. 137-140.
10. Pan, T., Hyman, D., Mehregany, M., Reshotko, E., and Garverick, S., "Microfabricated Shear Stress Sensors, Part 1: Design and Fabrication," AIAA Journal, Vol. 37, No. 1, 1999, pp. 66-72.
11. Hyman, D., Pan, T., Reshotko, E., and Mehregany, M., "Microfabricated Shear Stress Sensors, Part 2: Testing and Calibration," AIAA Journal, Vol. 37, No. 1, 1999, pp. 73-78.
12. Oudheusden, B., and Huijsing, J., "Integrated Flow Friction Sensor," Sensors and Actuators A, Vol. 15, 1988, pp. 135-144.
13. Liu, C., Tai, Y. C., Huang, J., and Ho, C. M., "Surface Micromachined Thermal Shear Stress Sensor," Proceedings of the American Society of Mechanical Engineers Symposium on Application of Microfabrication to Fluid Mechanics, American Society of Mechanical Engineers, New York, 1994, pp. 9-15.
14. Jiang, F., Tai, Y. C., Gupta, B., Goodman, R., Tung, S., Huang, J. B., and Ho, C. M., "A Surface-Micromachined Shear Stress Imager," Proceedings of the MEMS '96, Inst. of Electrical and Electronics Engineers, Piscataway, NJ, 1996, pp. 110-115.
15. Liu, C., Huang, C.-B., Zhu, Z., Jiang, F., Tung, S., Tai, Y.-C., and Ho, C.-M., "A Micromachined Flow Shear-Stress Sensor Based on Thermal Transfer Principles," Journal of Microelectromechanical Systems, Vol. 8, No. 1, 1999, pp. 90-99.
16. Kälvesten, E., "Pressure and Wall Shear Stress Sensors for Turbulence Measurements," Ph.D. Dissertation, Dept. of Signals, Sensors and Systems, Royal Inst. of Technology, Stockholm, 1996.
17. Kälvesten, E., Stemme, G., Vieider, C., and Löfdahl, L., "An Integrated Pressure-Flow Sensor for Correlation Measurements in Turbulent Gas Flows," Sensors and Actuators A: Physical, Vol. 52, 1996, pp. 51-58.
18. Lofdahl, L., Kälvesten, E., Hadzianagnostakis, T., and Stemme, G., "An Integrated Silicon Based Wall Pressure-Shear Stress Sensor for Measurements in Turbulent Flows," Proceedings of the 1996 American Society of Mechanical Engineers International Mechanical Engineering Congress and Exposition, American Society of Mechanical Engineers, New York, 1996, pp. 245-251.
19. Breuer, K. S., "MEMS Sensors for Aerodynamic Applications - the Good, the Bad (and the Ugly)," AIAA Paper 2000-0251, Jan. 2000.
20. Cain, A., Chandrasekaran, V., Nishida, T., and Sheplak, "Development of a Wafer-Bonded, Silicon Nitride Membrane Thermal Shear-Stress Sensor with Platinum Sensing Element," Proceedings of the Solid-State Sensor Actuator Workshop, Transducer Research Foundation, Cleveland, OH, 2000, pp. 300-303.
21. Jiang, F., Tai, Y. C., Ho, C. M., and Li, W. J., "A Micromachined Polysilicon Hot-Wire Anemometer," Proceedings of the Solid-State Sensor Actuator Workshop, Transducer Research Foundation, Cleveland, OH, 1994, pp. 264-267.
22. Bellhouse, B. J., and Schultz, D. L., "The Determination of Fluctuating Velocity in Air with Thin Film Gauges," Journal of Fluid Mechanics, Vol. 29, No. 2, 1967, pp. 289-295.
23. Brison, J. F., Charnay, G., and Comte-Bellot, G., "Calculation of the Heat Transfer Between a Hot Film and a Substrate Using a Two-Dimensional Model: Prediction of the Dynamic Response for Ordinary Probes," International Journal of Heat and Mass Transfer, Vol. 22, No. 1, 1979, pp. 111-119.
24. Perry, A. E., Smits, A. J., and Chong, M. S., "The Effects of Certain Low Frequency Phenomena on the Calibration of Hot Wires," Journal of Fluid Mechanics, Vol. 90, 1979, pp. 415-431.
25. White, F. M., Viscous Fluid Flow, McGraw-Hill, New York, 1974, pp. 143-148.
26. Oppenheim, A. V., Willsky, A. S., and Young, I. T., Signals and Systems, Prentice-Hall, Upper Saddle River, NJ, 1983, Chap. 3.
27. Bendat, J. S., and Piersol, A. G., Engineering Applications of Correlation and Spectral Analysis, Wiley-Interscience, New York, 1993, Chap. 5.
28. Richardson, E. G., and Tyler, E., "The Transverse Velocity Gradients near Mouths of Pipes in Which an Alternating or Continuous Flow of Air is Established," Proceedings of the Physical Society of London, Vol. 42, 1929, pp. 1-15.
29. Sexl, T. Z., "Über die von E. G. Richardson Entdeckten Annulareffekt," Physica, Vol. 61, 1930, pp. 349-362.
30. Abramowitz, M., and Stegun, I. A., Handbook of Mathematical Functions. 9th ed., Dover, New York, 1972, p. 374.
31. Morse, P. M., and Ingard, K. U., Theoretical Acoustics, McGraw-Hill, New York, 1968, Chap. 9.
32. JBL Professional, 2446H/J Compression Driver Specification Sheet, Northridge, CA, Oct. 1996.