Integration of InGaN-based optoelectronics with dissimilar substrates by wafer bonding and laser lift-off

Materials Research Society Symposium Proceedings

Volumn 681, Issue , 2001, Pages 112-120

  Wong, William S ^a   Kneissl, Michael ^a   Treat, David W ^a   Teepe, Mark ^a   Miyashita, Naoko ^a   Johnson, Noble M ^a  

^a PALO ALTO RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMITTING DIODES; SAPPHIRE; SEMICONDUCTOR LASERS; THIN FILMS; ULTRAVIOLET RADIATION; WAFER BONDING;

LIFT OFF PROCESSES; THIN FILM LASERS; TRANSPARENT SUBSTRATES;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 34249900718     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-681-i6.1     Document Type: Conference Paper

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