Spatially resolved crack-tip stress analysis in semiconductor by cathodoluminescence piezospectroscopy

Journal of Applied Physics

Volumn 101, Issue 10, 2007, Pages

  Zhu, Wenliang ^a   Porporati, Alessandro Alan ^a   Matsutani, Atsuo ^a   Lama, Nicola ^a   Pezzotti, Giuseppe ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODOLUMINESCENCE; CRACK PROPAGATION; GALLIUM NITRIDE; GOLD; LIGHT MEASUREMENT; STRESS ANALYSIS;

CATHODOLUMINESCENCE PIEZOSPECTROSCOPY; CRACK TIP STRESS ANALYSIS; PARADIGM SEMICONDUCTOR MATERIALS; PROBE RESPONSE FUNCTION (PRF);

SEMICONDUCTOR MATERIALS;

EID: 34249889989     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2735681     Document Type: Article

References (39)

1. D. J. Cartwright, RAE Technical Report No. 73031 (unpublished).
2. A. S. Kobayashi, in Fracture III, edited by, H. Liebowitz, (Academic, New York, 1969), pp. 311-369.
3. D. T. Read, J. W. Dally, and M. Szanto, Exp. Mech. 33, 110 (1993).
4. F. P. Chiang, in Manual of Stress Analysis Techniques, edited by, A. S. Kobayashi, (SESA, Westport, CT, 1978).
5. Q. Ma and D. R. Clarke, J. Am. Ceram. Soc. 77, 298 (1994).
6. G. Pezzotti and W. Mueller, Continuum Mech. Thermodyn. 14, 113 (2002).
7. D. T. Read and J. W. Dally, J. Res. Natl. Inst. Stand. Technol. 101, 47 (1996).
8. T. Kinoshita, Acta Mater. 46, 3963 (1998).
9. F. Celarie, S. Prades, D. Bonamy, L. Ferrero, E. Bouchaud, C. Guillot, and C. Marlierer, Phys. Rev. Lett. 90, 075504 (2003).
10. J.-P. Guin and S. M. Wiederhorn, Phys. Rev. Lett. 92, 215502 (2004).
11. M. F. Tabet and F. K. Urban, III, J. Vac. Sci. Technol. B 15, 800 (1997).
12. K. Wan, A. A. Porporati, G. Feng, H. Yang, and G. Pezzotti, Appl. Phys. Lett. 88, 251910 (2006).
13. G. Pezzotti, K. Wan, M. C. Munisso, and W. Zhu, Appl. Phys. Lett. 89, 041908 (2006).
14. J. W. Orton, Semicond. Sci. Technol. 11, 1026 (1996).
15. W. Shan, R. J. Hauenstein, A. J. Fischer, J. J. Song, W. G. Perry, M. D. Bremser, R. F. Davis, and D. Goldenberg, Phys. Rev. B 54, 13460 (1996).
16. MATHEMATICA 5.0, Wolfram Research, Inc., Champaign, IL, USA.
17. A. K. Viswanath, J. I. Lee, S. Yu, and D. Kim, J. Appl. Phys. 84, 3848 (1998).
18. B. Monemar, Phys. Rev. B 10, 676 (1974).
19. ORIGIN 7.0, OriginLab, Co., North Hampton, MA, USA.
20. L. Grabner, J. Appl. Phys. 49, 582 (1978).
21. J. F. Nye, Physical Properties of Crystals (Oxford University Press, New York, 1985).
22. H. Y. Peng, M. D. McCluskey, Y. M. Gupta, M. Kneissl, and N. M. Johnson, Phys. Rev. B 71, 115207 (2005).
23. K. Kim, W. R. L. Lambrecht, B. Segall, and M. van Shilfgaarde, Phys. Rev. B 56, 7363 (1997).
24. M. L. Biermann, S. Duran, K. Peterson, A. Gerhardt, J. W. Tomm, A. Bercha, and W. Trzeciakowski, J. Appl. Phys. 96, 4056 (2004).
25. S. Kim, I. P. Herman, J. A. Tuchman, K. Doverspike, L. B. Rowland, and D. K. Gaskill, Appl. Phys. Lett. 67, 380 (1995).
26. L. Ji, N. Su, and J. Simon (unpublished).
27. K. Kanaya and S. Okayama, J. Phys. D 5, 43 (1972).
28. K. Knobloch, P. Perlin, J. Krueger, and E. R. Weber, MRS Internet J. Nitride Semicond. Res. 3, 4 (1998).
29. J. Seidel and J. Roedel, J. Am. Ceram. Soc. 80, 433 (1997).
30. H. Tada, P. C. Paris, and G. R. Irwin, The Stress Analysis of Cracks Handbook (Del Research, Hellertown, PA, 1973).
31. T. Fett, Forschungszentrum Karlsruhe Report No. FZKA 6757 (unpublished).
32. Mechanics of Fracture 6; Cracks in Composite Materials, edited by, G. C. Sih, and, E. P. Chen, (Martinus Nijhoff, The Hague, Netherlands, 1981).
33. D. Broek, Elementary Engineering Fracture Mechanics (Martinus Nijhoff, The Hague, Netherlands, 1982).
34. S. L. Chuang and C. S. Chang, Phys. Rev. B 54, 2491 (1996).
35. R. N. Bracewell, Two-Dimensional Imaging (Prentice-Hall, Englewood Cliffs, NJ, 1995).
36. R. Nowak, M. Pessa, M. Suganuma, M. Leszczynski, I. Grzegory, S. Porowsky, and F. Yoshida, Appl. Phys. Lett. 75, 2070 (1999).
37. I. Yonenaga and K. Motoki, J. Appl. Phys. 90, 6539 (2001).
38. W. Elber, " The significance of fatigue crack closure. ". ASTM Spec. Tech. Publ. 486, 230 (1971).
39. J. C. Newman and I. S. Raju, NASA Technical Paper No. 1578 1979 (unpublished).