Deconvolution of tip affected atomic force microscope images and comparison to Rutherford backscattering spectrometry

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 800-804

  Tabet, M F ^a   Urban III, F K ^a  

^a The Department of Electrical and Computer Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844266920     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589412     Document Type: Review

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