메뉴 건너뛰기




Volumn 124, Issue 2, 2007, Pages 535-541

Comprehensive investigation of hydrogen-sensing properties of Pt/InAlP-based Schottky diodes

Author keywords

Hydrogen sensor; InAlP; MOS; MS; Pt metal; Semiconductor type

Indexed keywords

ADSORPTION; CHEMICAL SENSORS; CURRENT VOLTAGE CHARACTERISTICS; HYDROGEN; MOS DEVICES; PLATINUM; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR METAL BOUNDARIES;

EID: 34249869537     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.01.017     Document Type: Article
Times cited : (9)

References (33)
  • 1
    • 0031192671 scopus 로고    scopus 로고
    • High temperature sensors based on metal-insulator-silicon carbide devices
    • Spetz A.L., Baranzahi A., Tobias P., and Lundström I. High temperature sensors based on metal-insulator-silicon carbide devices. Phys. Status Solidi (a) 162 (1997) 493-511
    • (1997) Phys. Status Solidi (a) , vol.162 , pp. 493-511
    • Spetz, A.L.1    Baranzahi, A.2    Tobias, P.3    Lundström, I.4
  • 2
    • 0028531357 scopus 로고
    • x or ZnO)-insulator-semiconductor gas sensors
    • x or ZnO)-insulator-semiconductor gas sensors. Sens. Actuators B 22 (1994) 47-55
    • (1994) Sens. Actuators B , vol.22 , pp. 47-55
    • Kang, W.P.1    Kim, C.K.2
  • 3
    • 17244367639 scopus 로고    scopus 로고
    • Enhanced hydrogen-sensing characteristics of MISiC Schottky-diode hydrogen sensor by trichloroethylene oxidation
    • Tang W.M., Lai P.T., Xu J.P., and Chan C.L. Enhanced hydrogen-sensing characteristics of MISiC Schottky-diode hydrogen sensor by trichloroethylene oxidation. Sens. Actuators A 119 (2005) 63-67
    • (2005) Sens. Actuators A , vol.119 , pp. 63-67
    • Tang, W.M.1    Lai, P.T.2    Xu, J.P.3    Chan, C.L.4
  • 5
    • 33244489348 scopus 로고    scopus 로고
    • A study of fast response characteristics for hydrogen sensing with platinum FET sensor
    • Tsukada K., Kiwa T., Yamaguchi T., Migitaka S., Goto Y., and Yokosawa K. A study of fast response characteristics for hydrogen sensing with platinum FET sensor. Sens. Actuators B 114 (2006) 158-163
    • (2006) Sens. Actuators B , vol.114 , pp. 158-163
    • Tsukada, K.1    Kiwa, T.2    Yamaguchi, T.3    Migitaka, S.4    Goto, Y.5    Yokosawa, K.6
  • 6
    • 0031101013 scopus 로고    scopus 로고
    • Highly sensitive MOSFET gas sensors with porous platinum gate electrode
    • Seo H., Endoh T., Fukuda H., and Nomura S. Highly sensitive MOSFET gas sensors with porous platinum gate electrode. IEE Electron. Lett. 33 (1997) 535-536
    • (1997) IEE Electron. Lett. , vol.33 , pp. 535-536
    • Seo, H.1    Endoh, T.2    Fukuda, H.3    Nomura, S.4
  • 8
    • 33646942981 scopus 로고    scopus 로고
    • Sensing mechanism of InP hydrogen sensors using Pt Schottky diodes formed by electrochemical process
    • Kimura T., Hasegawa H., Sato T., and Hashizume T. Sensing mechanism of InP hydrogen sensors using Pt Schottky diodes formed by electrochemical process. Jpn. J. Appl. Phys. 45 (2006) 3414-3422
    • (2006) Jpn. J. Appl. Phys. , vol.45 , pp. 3414-3422
    • Kimura, T.1    Hasegawa, H.2    Sato, T.3    Hashizume, T.4
  • 9
    • 13444280434 scopus 로고    scopus 로고
    • A new Pd-InP Schottky hydrogen sensor fabricated by electrophoretic deposition with Pd nanoparticles
    • Chou Y.I., Chen C.M., Liu W.C., and Chen H.I. A new Pd-InP Schottky hydrogen sensor fabricated by electrophoretic deposition with Pd nanoparticles. IEEE Electron Devices Lett. 26 (2005) 62-64
    • (2005) IEEE Electron Devices Lett. , vol.26 , pp. 62-64
    • Chou, Y.I.1    Chen, C.M.2    Liu, W.C.3    Chen, H.I.4
  • 10
    • 29244476026 scopus 로고    scopus 로고
    • Pd/porous-GaAs Schottky contact for hydrogen sensing application
    • Salehi A., Nikfarjam A., and Kalantari D.J. Pd/porous-GaAs Schottky contact for hydrogen sensing application. Sens. Actuators B 113 (2006) 419-427
    • (2006) Sens. Actuators B , vol.113 , pp. 419-427
    • Salehi, A.1    Nikfarjam, A.2    Kalantari, D.J.3
  • 11
    • 33845301707 scopus 로고
    • Comparison and analysis of Pd- and Pt-GaAs Schottky diodes for hydrogen detection
    • Kang W.P., and Gürbüz Y. Comparison and analysis of Pd- and Pt-GaAs Schottky diodes for hydrogen detection. J. Appl. Phys. 75 (1994) 8175-8181
    • (1994) J. Appl. Phys. , vol.75 , pp. 8175-8181
    • Kang, W.P.1    Gürbüz, Y.2
  • 12
    • 0019624025 scopus 로고
    • Effect of various substrates on the hydrogen sensitivity of palladium-semiconductor diodes
    • Yamamoto N., Tonomura S., Matsuoka T., and Tsubomura H. Effect of various substrates on the hydrogen sensitivity of palladium-semiconductor diodes. J. Appl. Phys. 52 (1981) 6227-6230
    • (1981) J. Appl. Phys. , vol.52 , pp. 6227-6230
    • Yamamoto, N.1    Tonomura, S.2    Matsuoka, T.3    Tsubomura, H.4
  • 18
    • 0032632726 scopus 로고    scopus 로고
    • High temperature Pt Schottky diode gas sensors on n-type GaN
    • Luther B.P., Wolter S.D., and Mohney S.E. High temperature Pt Schottky diode gas sensors on n-type GaN. Sens. Actuators B 56 (1999) 164-168
    • (1999) Sens. Actuators B , vol.56 , pp. 164-168
    • Luther, B.P.1    Wolter, S.D.2    Mohney, S.E.3
  • 19
    • 24144452804 scopus 로고    scopus 로고
    • AlGaN/GaN Schottky diode hydrogen sensor performance at high temperatures with different catalytic metals
    • Song J.H., Lu W., Flynn J.S., and Brandes G.R. AlGaN/GaN Schottky diode hydrogen sensor performance at high temperatures with different catalytic metals. Solid-State Electron 49 (2005) 1330-1334
    • (2005) Solid-State Electron , vol.49 , pp. 1330-1334
    • Song, J.H.1    Lu, W.2    Flynn, J.S.3    Brandes, G.R.4
  • 20
    • 15844368088 scopus 로고    scopus 로고
    • Pt Schottky diode gas sensors formed on GaN and AlGaN/GaN heterostructure
    • Matsuo K., Negoro N., Kotani J., Hashizume T., and Hasegawa H. Pt Schottky diode gas sensors formed on GaN and AlGaN/GaN heterostructure. Appl. Surf. Sci. 244 (2005) 273-276
    • (2005) Appl. Surf. Sci. , vol.244 , pp. 273-276
    • Matsuo, K.1    Negoro, N.2    Kotani, J.3    Hashizume, T.4    Hasegawa, H.5
  • 22
    • 0036155338 scopus 로고    scopus 로고
    • Comparative hydrogen-sensing study of Pd/GaAs and Pd/InP metal-oxide-semiconductor Schottky diodes
    • Liu W.C., Pan H.J., Chen H.I., Lin K.W., and Wang C.K. Comparative hydrogen-sensing study of Pd/GaAs and Pd/InP metal-oxide-semiconductor Schottky diodes. Jpn. J. Appl. Phys. 40 (2001) 6254-6259
    • (2001) Jpn. J. Appl. Phys. , vol.40 , pp. 6254-6259
    • Liu, W.C.1    Pan, H.J.2    Chen, H.I.3    Lin, K.W.4    Wang, C.K.5
  • 23
    • 0037203087 scopus 로고    scopus 로고
    • Spectroscopic investigation of hydrogen termination, oxide coverage, roughness, and surface state density of silicon during native oxidation in air
    • Henrion W., Rebien M., Angermann H., and Roseler A. Spectroscopic investigation of hydrogen termination, oxide coverage, roughness, and surface state density of silicon during native oxidation in air. Appl. Surf. Sci. 202 (2002) 199-205
    • (2002) Appl. Surf. Sci. , vol.202 , pp. 199-205
    • Henrion, W.1    Rebien, M.2    Angermann, H.3    Roseler, A.4
  • 25
    • 34249892342 scopus 로고    scopus 로고
    • 0.5P metal-semiconductor Schottky diode, J. Vac. Sci. Technol. B, in press.
  • 27
    • 0001297375 scopus 로고
    • Hydrogen and ammonia response of metal-silicon dioxide-silicon structures with thin platinum gates
    • Spetz A., Armgarth M., and Lundström I. Hydrogen and ammonia response of metal-silicon dioxide-silicon structures with thin platinum gates. J. Appl. Phys. 64 (1988) 1274-1283
    • (1988) J. Appl. Phys. , vol.64 , pp. 1274-1283
    • Spetz, A.1    Armgarth, M.2    Lundström, I.3
  • 29
    • 0345866741 scopus 로고    scopus 로고
    • Evaluation of the perfection of the Pd-InP Schottky interface from the energy viewpoint of hydrogen adsorbates
    • Chen H.I., and Chou Y.I. Evaluation of the perfection of the Pd-InP Schottky interface from the energy viewpoint of hydrogen adsorbates. Semicond. Sci. Technol. 19 (2004) 39-44
    • (2004) Semicond. Sci. Technol. , vol.19 , pp. 39-44
    • Chen, H.I.1    Chou, Y.I.2
  • 30
  • 31
    • 0038509898 scopus 로고    scopus 로고
    • 2 interface and simulation of the response of a Pd metal-oxide-semiconductor hydrogen sensors
    • 2 interface and simulation of the response of a Pd metal-oxide-semiconductor hydrogen sensors. J. Appl. Phys. 83 (1998) 3947-3951
    • (1998) J. Appl. Phys. , vol.83 , pp. 3947-3951
    • Eriksson, M.1    Ekedahl, L.G.2
  • 33
    • 0030127549 scopus 로고    scopus 로고
    • 2 reaction on Pd and of its influence on the hydrogen response of a hydrogen sensitive Pd metal-oxide-semiconductor device
    • 2 reaction on Pd and of its influence on the hydrogen response of a hydrogen sensitive Pd metal-oxide-semiconductor device. Surf. Sci. 350 (1996) 91-102
    • (1996) Surf. Sci. , vol.350 , pp. 91-102
    • Fogelberg, J.1    Petersson, L.G.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.