Hydrogen and hydrocarbon gas sensing performance of Pt/WO 3/SiC MROSiC devices

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 111-116

  Kandasamy, S ^a   Trinchi, A ^a   Wlodarski, W ^a   Comini, E ^b   Sberveglieri, G ^b  

^a RMIT UNIVERSITY   (Australia)

^b UNIVERSITY OF BRESCIA   (Italy)

Author keywords

Gas; Hydrogen; MOS; MROSiC; Propene; Schottky; Sensor; Tungsten trioxide

Indexed keywords

ANALYTE GAS; HYDROCARBON GAS SENSING; SEMICONDUCTING METAL OXIDES;

DEPOSITION; MAGNETRON SPUTTERING; SCHOTTKY BARRIER DIODES; SEMICONDUCTING FILMS; THERMAL EFFECTS;

CHEMICAL SENSORS;

EID: 25444494950     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.06.066     Document Type: Conference Paper

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