Application oriented complex polymer microoptics

Microsystem Technologies

Volumn 9, Issue 5, 2003, Pages 304-307

  Braeuer, A ^a   Dannberg, P ^a   Zeitner, U ^a   Mann, G ^a   Karthe, W ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAM EFFECTS; MICROLENSES; OPTICAL DEVICES; OPTOELECTRONIC DEVICES; REFRACTIVE INDEX;

OPTICAL FUNCTION; POLYMER MICROOPTICS; WAFER SCALE;

MICROOPTICS;

EID: 0037670652     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-002-0234-2     Document Type: Article

References (5)

1. Dannberg P; Braeuer A; Karthe W; Waldhäusl R; Wolter H (1994) Replication of waveguide elements using ORMOCERE material. In: Reichl H, Heuberger A (eds), Microsystem Technologies '94, VDE-Verlag, pp. 281-287
2. Haselbeck S; Schreiber H; Schwider J; Streibl N (1993) Microlenses fabricated by melting a photoresist on a base layer. Opt Eng 32: 1322
3. Erdmann L; Efferenn D (1997) Technique for monolithic fabrication of silicon microlenses with selectable rim angles. Opt Eng 36: 1094
4. Althaus HL; Gramann W; Panzer K (1998) Microsystems and wafer processesfor volume production of highly reliable fiber optic components for Telecom and Datacom applications. IEEE Trans Components, Packaging, and Manufacturing Technology - Part B 21: 147-156
5. Dannberg P; Bierbaum R; Erdmann L; Krehl A; Braeuer A; Kley EB (1999) Micro-optical elements and their integration to glass and optoelectronic wafers. Microsys Technol 6: 41-47