Fabrication and characterization of microlenses realized by a modified LIGA process

Pure and Applied Optics (Print edition) (United Kingdom)

Volumn 6, Issue 6, 1997, Pages 643-653

  Ruther, P ^a   Gerlach, B ^a   Gottert J ^a   Ilie, M ^b   Mohr, J ^a   Muller A ^a   Ossmann C ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; MELTING; POLYMETHYL METHACRYLATES; SEMICONDUCTOR DEVICE MANUFACTURE; SYNCHROTRONS; X RAY LITHOGRAPHY;

MICROLENSES;

LENSES;

EID: 0031277052     PISSN: 09639659     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-9659/6/6/006     Document Type: Article

References (4)

1. Fischer M, Göttert J, Guber A E, Köhler U, Mohr J, Oertmann F-W and Ruther P 1997 Proc. Abschlußseminar MINOP-Projekt VDI-VDE-Band Nr 50, pp 107-25
2. Becker E W, Ehrfeld W, Hagman P, Mauser A and Münchmeyer D 1986 Fabrication of microstructures with high aspect ratios and structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) Microelectron. Eng. 35 56
3. Göttert J, Fischer M and Müller A 1995 High-Aperture Surface Relief Microlenses fabricated by X-Ray Lithography and Melting, Microlenses Arrays (Teddington: EOS)
4. Batzer H 1985 Polymerewerkstoffe. Band 1: Chemie und Physik (Stuttgart: Thieme)