SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 201, Issue 18, 2007, Pages 7992-7999

Process monitoring during AlN deposition by reactive magnetron sputtering

(4) Acosta, J a Rojo, A a Salas, O a Oseguera, J a

a SCHOOL OF ENGINEERING AND SCIENCES (Mexico)

Author keywords

AlN; DC magnetron sputtering; Langmuir probe; Optical emission spectroscopy; Plasma monitoring

Indexed keywords

ALUMINUM ALLOYS; CHARACTERIZATION; DEPOSITION; LANGMUIR PROBES; OPTICAL EMISSION SPECTROSCOPY; PROCESS MONITORING; REACTIVE SPUTTERING;

DC MAGNETRON SPUTTERING; PLASMA CHARACTERIZATION;

MAGNETRON SPUTTERING;

ALUMINUM ALLOYS; CHARACTERIZATION; DEPOSITION; LANGMUIR PROBES; MAGNETRON SPUTTERING; OPTICAL EMISSION SPECTROSCOPY; PROCESS MONITORING; REACTIVE SPUTTERING;

EID: 34249301765 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2007.03.048 Document Type: Article

Times cited : (15)

References (17)

1
- 13444266367
- Musil J., Baroch P., Vlcek J., Nam K.H., and Han J.G. Thin Solid Films 475 (2005) 208
- (2005) Thin Solid Films , vol.475 , pp. 208
- Musil, J.¹ Baroch, P.² Vlcek, J.³ Nam, K.H.⁴ Han, J.G.⁵

2
- 0037461188
- Cheng H., and Hing P. Surf. Coat. Technol. 167 (2003) 297
- (2003) Surf. Coat. Technol. , vol.167 , pp. 297
- Cheng, H.¹ Hing, P.²

3
- 14544292985
- Brudnik A., Czapla A., and Kusior E. Thin Solid Films 478 (2005) 67
- (2005) Thin Solid Films , vol.478 , pp. 67
- Brudnik, A.¹ Czapla, A.² Kusior, E.³

4
- 17744403306
- Lu Y.M., Weing R.J., Hwang W.S., and Yang Y.S. Thin Solid Films 398-399 (2001) 356
- (2001) Thin Solid Films , vol.398-399 , pp. 356
- Lu, Y.M.¹ Weing, R.J.² Hwang, W.S.³ Yang, Y.S.⁴

5
- 51349166680
- Rossangel S.M., and kaufman H.R. J. Vac. Sci. Technol., A 6 (1988) 223
- (1988) J. Vac. Sci. Technol., A , vol.6 , pp. 223
- Rossangel, S.M.¹ kaufman, H.R.²

6
- 0033132723
- Posadowski W.M., and Brudnik A. Vacuum 53 (1999) 11
- (1999) Vacuum , vol.53 , pp. 11
- Posadowski, W.M.¹ Brudnik, A.²

7
- 13444267781
- Kim Y.M., Jung M.J., Oh S.G., and Han J.G. Thin Solid Films 475 (2005) 91
- (2005) Thin Solid Films , vol.475 , pp. 91
- Kim, Y.M.¹ Jung, M.J.² Oh, S.G.³ Han, J.G.⁴

8
- 0037778074
- Zambrano G., Riascos H., Prieto P., Restrepo E., Devia A., and Rincon C. Surf. Coat. Technol. 172 (2003) 144
- (2003) Surf. Coat. Technol. , vol.172 , pp. 144
- Zambrano, G.¹ Riascos, H.² Prieto, P.³ Restrepo, E.⁴ Devia, A.⁵ Rincon, C.⁶

9
- 14544292985
- Brudnik A., Czapla A., and Kusior E. Thin Solid Films 478 (2005) 67
- (2005) Thin Solid Films , vol.478 , pp. 67
- Brudnik, A.¹ Czapla, A.² Kusior, E.³

10
- 13844309319
- Berg S., and Nyberg T. Thin Solid Films 476 (2005) 215
- (2005) Thin Solid Films , vol.476 , pp. 215
- Berg, S.¹ Nyberg, T.²

11
- 0024641687
- Thornton J.A., and Hoffman D.W. Thin Solid Films 171 (1989) 5
- (1989) Thin Solid Films , vol.171 , pp. 5
- Thornton, J.A.¹ Hoffman, D.W.²

12
- 0032183526
- Dimitrova V., Manova D., Paskova T., Uzunov Tz., Ivanov N., and Dechev D. Vacuum 5 2 (1998) 161
- (1998) Vacuum , vol.5 , Issue.2 , pp. 161
- Dimitrova, V.¹ Manova, D.² Paskova, T.³ Uzunov, Tz.⁴ Ivanov, N.⁵ Dechev, D.⁶

13
- 0040285967
- Dimitrova V.I., Manova D.I., and Dechev D.A. Vacuum 49 3 (1998) 193
- (1998) Vacuum , vol.49 , Issue.3 , pp. 193
- Dimitrova, V.I.¹ Manova, D.I.² Dechev, D.A.³

14
- 34249295806
- Figueroa U., Salas O., and Oseguera J. Surf. Eng. 22 2 (2006)
- (2006) Surf. Eng. , vol.22 , Issue.2
- Figueroa, U.¹ Salas, O.² Oseguera, J.³

15
- 0031189498
- Vacandio F., Massiani Y., Gravier P., and Garnier A. Surf. Coat. Technol. 92 (1997) 221
- (1997) Surf. Coat. Technol. , vol.92 , pp. 221
- Vacandio, F.¹ Massiani, Y.² Gravier, P.³ Garnier, A.⁴

16
- 34249304669
- http://www.lasurface.com.

17
- 34249307145
- http://srdata.nist.gov/xps.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.