AlN thin films prepared by optical emission spectroscopy-controlled reactive sputtering

Thin Solid Films

Volumn 478, Issue 1-2, 2005, Pages 67-71

  Brudnik, A ^a   Czapla, A ^a   Kusior, E ^a  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

Author keywords

Aluminium nitride; Optical properties; Sputtering

Indexed keywords

ALUMINUM NITRIDE; ARGON; EMISSION SPECTROSCOPY; ENERGY GAP; LIGHT EMISSION; MAGNETRONS; MIXTURES; SPUTTERING;

BAND GAPS; OIL PUMPS; OPTICAL EMISSION SPECTROSCOPY; REACTIVE SPUTTERING;

THIN FILMS;

EID: 14544292985     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.10.004     Document Type: Article

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