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Surface and Coatings Technology

Volumn 92, Issue 3, 1997, Pages 221-229

A study of the physical properties and electrochemical behaviour of aluminium nitride films

(4) Vacandio, F a Massiani, Y a Gravier, P a Garnier, A a

a AIX MARSEILLE UNIVERSITY (France)

Author keywords

Aluminium nitride; Ceramic phase; Metallic phase; Stoichiometry

Indexed keywords

CORROSION RESISTANCE; ELECTRIC RESISTANCE MEASUREMENT; HYDROCHLORIC ACID; PHASE COMPOSITION; PHASE DIAGRAMS; PRESSURE EFFECTS; SPUTTER DEPOSITION; STOICHIOMETRY; SUBSTRATES; SULFURIC ACID; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE;

NITRIDES;

EID: 0031189498 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00103-5 Document Type: Article

Times cited : (32)

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