Optical emission spectroscopy of self-sustained magnetron sputtering

Vacuum

Volumn 53, Issue 1-2, 1999, Pages 11-15

  Posadowski, W M ^a   Brudnik, A ^b  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; EMISSION SPECTROSCOPY; IONS; LIGHT EMISSION; PLASMAS; SPUTTER DEPOSITION; THERMAL CONDUCTIVITY; THIN FILMS;

COPPER DEPOSITION; HIGH DENSITY PLASMA; HIGH TARGET POWER DENSITY; OPTICAL EMISSION SPECTROSCOPY; SELF SUSTAINED MAGNETRON SPUTTERING;

MAGNETRON SPUTTERING;

EID: 0033132723     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(98)00412-6     Document Type: Article

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