Structure and properties of zirconia (ZrO2) films fabricated by plasma-assisted cathodic arc deposition

Journal of Physics D: Applied Physics

Volumn 40, Issue 8, 2007, Pages 2293-2299

  Li, Weifeng ^a,b   Liu, Xuanyong ^a,b,c   Huang, Anping ^a   Chu, Paul K ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b HUNAN UNIVERSITY   (China)

^c SHANGHAI INSTITUTE OF CERAMICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

APATITE; ATOMIC FORCE MICROSCOPY; DEPOSITION; ELECTRIC ARCS; PHASE COMPOSITION; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION; ZIRCONIA;

DEPOSITION PROCESSING PARAMETERS; PLASMA ASSISTED CATHODIC ARC DEPOSITION; SURFACE MICROSTRUCTURES;

THIN FILMS;

EID: 34249101977     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/8/S08     Document Type: Article

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