XPS study of amorphous zirconium oxide films prepared by sol-gel

Applied Surface Science

Volumn 143, Issue 1, 1999, Pages 85-91

  Brenier, R ^a   Mugnier, J ^a   Mirica, E ^b  

^a UNIVERSITÉ LYON 1   (France)

^b Stevens Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ARGON; COATING TECHNIQUES; ION BOMBARDMENT; SOL-GELS; THICK FILMS; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIA;

DIP COATING; ION IRRADIATION;

AMORPHOUS FILMS;

EID: 0032665243     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00901-5     Document Type: Article

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