Analysis, testing and optimisation of electrostatic comb-drive levitational actuators

Analog Integrated Circuits and Signal Processing

Volumn 48, Issue 1, 2006, Pages 33-40

  Molfese, A ^a,b,c   Nannini, A ^b,c,d,e   Pennelli, G ^b,c   Pieri, F ^b  

^a CNR   (Italy)

^b Dipartimento di Ingegneria dell'Informazione   (Italy)

^c UNIVERSITY OF PISA   (Italy)

^d Italian National Research Council ^*

^e UESTC of China   (China)

Author keywords

Electrostatic levitation; FEM simulations; Resonators

Indexed keywords

ELECTROSTATIC LEVITATION; FINITE ELEMENT METHODS SIMULATIONS; GEOMETRICAL PARAMETERS; TORSIONAL ACTUATION;

COMPUTER SIMULATION; ELECTRONIC EQUIPMENT TESTING; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROMACHINING; OPTIMIZATION; RESONATORS;

ACTUATORS;

EID: 33745639656     PISSN: 09251030     EISSN: 15731979     Source Type: Journal    
DOI: 10.1007/s10470-006-8119-4     Document Type: Conference Paper

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