Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM

Microelectronics Journal

Volumn 35, Issue 9, 2004, Pages 739-748

  Chyuan, Shiang Woei ^a   Liao, Yunn Shiuan ^a   Chen, Jeng Tzong ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

Combdrive; DBEM; Electrostatic; FEM; Levitating force; MEMS

Indexed keywords

BOUNDARY ELEMENT METHOD; CAPACITANCE; ELECTROSTATICS; FINITE ELEMENT METHOD; MICROMACHINING; POLYSILICON; SUBSTRATES;

COMBDRIVE; LEVITATING FORCE; TORSIONAL MOTIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 3943066338     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2004.06.005     Document Type: Article

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