Effect of RF power on the properties of transparent conducting zirconium-doped zinc oxide films prepared by RF magnetron sputtering

Chinese Physics

Volumn 16, Issue 2, 2007, Pages 548-552

  Lü, Mao Shui ^a   Pang, Zhi Yong ^a   Xiu, Xian Wu ^a   Dai, Ying ^a   Han, Sheng Hao ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Sputtering; Ttransparent conducting films; Zinc oxide; Zirconium

Indexed keywords

DOPING (ADDITIVES); HALL MOBILITY; MAGNETRON SPUTTERING; POLYCRYSTALLINE MATERIALS; ZINC OXIDE; ZIRCONIUM;

CRYSTALLINITY; RADIO FREQUENCY (RF) MAGNETRON SPUTTERING; TRANSPARENT CONDUCTING FILMS; ZINC OXIDE FILMS;

THIN FILMS;

EID: 34249085052     PISSN: 10091963     EISSN: 17414199     Source Type: Journal    
DOI: 10.1088/1009-1963/16/2/044     Document Type: Article

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