Band-edge metal gate materials for atomic-layer-deposited HfO2 for future CMOS technology

Microelectronic Engineering

Volumn 84, Issue 9-10, 2007, Pages 2205-2208

  Hasan, Musarrat ^a   Park, Hokyung ^a   Lee, Joon myong ^a   Jo, Minseak ^a   Hwang, Hyunsang ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Band edge work function; Ruthenium and Ruthenium oxide; Scandium; TaNx interface layer

Indexed keywords

ATOMIC LAYER DEPOSITION; BAND STRUCTURE; CMOS INTEGRATED CIRCUITS; FILM THICKNESS; HAFNIUM COMPOUNDS; WORK FUNCTION;

BAND EDGE WORK FUNCTION; P-CHANNEL METAL-OXIDE SEMICONDUCTOR (PMOS); RUTHENIUM OXIDE;

SEMICONDUCTOR MATERIALS;

EID: 34248641995     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.04.028     Document Type: Article

References (11)

1. Yu H.Y., Ren C., Yeo Y.-C., Kang J.F., Wang X.P., Ma H.H.H., Li M.-F., Chan D.S.H., and Kwong D.-L. IEEE EDL 25 (2004) 337
2. C. Hobbs, L. Fonseca, V. Dhandapani, S. Samavedam, B. Taylor, J. Grant, L. Dip, D. Triyoso, R. Hedge, D. Gilmer, R. Garcia, D. Roan, L. Lovejoy, R. Rai, L. Hebert, H. Tseng, B. White, P. Tobin, IEEE Technical Digest-VLSI Symposium, 2003, pp. 9-10.
3. Zhong H., Heuss G., Misra V., Luan H., Lee C.-H., and Kwong D.-L. IEEE EDL 78 (2001) 1134
4. Yang H., Park H., Lee D., Choi S., and Hwang H. Jap. J. Appl. Phys. 44 (2005) L1275
5. Yang H., Heo S., Lee D., Choi S., and Hwang H. Jap. J. Appl. Phys. 45 (2006) L83
6. Michaelson H.B. J. Appl. Phys. 48 (1977) 4729
7. Ren C., Yu H.Y., Kang J.F., Hou Y.T., Li M.-F., Wang W.D., Chan D.S.H., and Kwong D.-L. IEEE EDL 25 (2004) 123
8. J. Lee, H. Zhong, Y.-S. Suh, G. Heuss, J. Gurganus, B. Chen, V. Misra, IEEE Electronic Device Meeting (2002) p. 359.
9. J. Lee, Y.-S. Suh, H. Lazar, R. Jha, J. Gurganus, Y. Lin, V. Misra, IEEE Electronic Device Meeting (2003) p. 323.
10. Jelenkovic E.V., and Tong K.Y. J. Vac. Sc. Tech. B 22 (2004) 2319
11. Zhong H., Heuss G., Misra V., Luan H., Lee C.-H., and Kwong D.-L. Appl. Phys. Lett. 78 (2001) 1134