Shear wave transducer using (112̄0) textured ZnO film

Proceedings - IEEE Ultrasonics Symposium

Volumn 2, Issue , 2004, Pages 906-909

  Yanagitani, Takahiko ^a   Matsukawa, Mami ^a   Watanabe, Yoshiaki ^a   Otani, Takahiko ^a  

^a DOSHISHA UNIVERSITY   (Japan)

Author keywords

(11 20) Textured films; Shear wave transducer; ZnO film

Indexed keywords

ANODES; COMPONENTS; DEPOSITION; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; RESONATORS; SHEAR WAVES; TEXTURES; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAYS; ZINC OXIDE;

(11-20) TEXTURED FILMS; CRYSTALLITES; SHEAR WAVE TRANSDUCERS; ZNO FILMS;

TRANSDUCERS;

EID: 21644455155     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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9. T. Yanagitani, S. Tomohiro, T. Nohara, M. Matsukawa, Y. Watanabe and T. Otani, "Characterization of (112̄0) textured ZnO films fabricated by RF magnetron sputtering," Jpn.J.Appl.Phys., vol. 43, pp.3004-3007, May 2004.
10. T. Yanagitani, M. Matsukawa, Y. Watanabe and T. Otani, "Formation of uniaxially (112̄0) textured ZnO films on glass substrate" J.Crystal Growth, submitted.