Improving the optical characteristics of bimetallic grayscale photomasks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6458, Issue , 2007, Pages

  Dykes, James M ^a   Poon, David K ^a   Wang, Jun ^a   Tsui, Jimmy T K ^a   Chapman, Glenn H ^a  

^a SIMON FRASER UNIVERSITY   (Canada)

Author keywords

3D microstructures; Beam shaping; Bimetallic photomask; Grayscale photomask

Indexed keywords

BIMETALS; LASER BEAMS; MICROSTRUCTURE; OPTICAL PROPERTIES; THIN FILMS; THREE DIMENSIONAL;

3D MICROSTRUCTURES; BEAM SHAPING; BIMETALLIC PHOTOMASKS; GRAYSCALE PHOTOMASKS;

PHOTOMASKS;

LASERS; MICROSTRUCTURE; OPTICAL PROPERTIES; THIN FILMS;

EID: 34248374278     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.702589     Document Type: Conference Paper

References (19)

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