Synchrotron X-ray reflectivity studies of nanoporous organosilicate thin films with low dielectric constants

Journal of Applied Crystallography

Volumn 40, Issue SUPPL. 1, 2007, Pages

  Oh, Weontae ^a   Hwang, Yongtaek ^b   Shin, Tae Joo ^b   Lee, Byeongdu ^b   Kim, Jong Seong ^b   Yoon, Jinhwan ^b   Brennan, Sean ^c   Mehta, Apurva ^c   Ree, Moonhor ^b  

^a Dong Eui University   (South Korea)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

Author keywords

Electron density; Nanopores; Nanoporous dielectric; Porogen; Porosity; Thin film structure; X ray reflectivity

Indexed keywords

EID: 34248365730     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S0021889806047509     Document Type: Conference Paper

References (25)

1. Bolze, J., Kim, J., Huang, J.-Y., Rah, S., Youn, H. S., Lee, B., Shin, T. J. & Ree, M. (2002). Macromol. Res. 10, 2-12.
2. Bolze, J., Ree, M., Yoon, H. S., Chu, S.-H. & Char, K. (2001). Langmuir, 17, 6683-6691.
3. Clark, D. T. & Feast W. J. (1978). Polymer Surfaces. New York: Wiley.
4. Fleer, G. J., Cohen Stuart, M. A., Scheutjens, J. M. H. M., Cosgrove, T. & Vincent, B. (1993). Polymers at Interfaces. New York: Chapman and Hall.
5. Gibaud, A., Vignaud, G. & Sinha, S. K. (1993). Acta Cryst. A49, 642-648.
6. Harmer, M. A., Farneth, W. E. & Sun, Q. (1996). J. Am. Chem. Soc. 118, 7708-7715.
7. Huang, E., Toney, M. F., Volksen, W., Mecerreyes, D., Brock, P., Kim, H.-C., Hawker, C. J., Hedrick, J. L., Lee, V. Y., Magbitang, T. & Miller, R. D. (2002). Appl. Phys. Lett. 81, 2232-2234.
8. Hwang, Y., Heo, K., Chang, C. H., Joo, M. K. & Ree, M. (2006). Thin Solid Films, 510, 159-163.
9. Kiessig, H. (1931). Ann. Phys. 10, 769-788.
10. Lee, H.-J., Lin, E. K., Wang, H., Wu, W.-L., Chen, W. & Moyer, E. C. (2002). Chem. Mater. 14, 1845-1852.
11. Lee, B., Oh, W., Hwang, Y., Park, Y.-H., Yoon, J., Jin, K. S., Heo, K., Kim, J., Kim, K.-W. & Ree, M. (2005). Adv. Mater. 17, 696-701.
12. Lee, B., Oh, W., Yoon, J., Hwang, Y., Kim, J., Landes, B. G., Quintana, J. P. & Ree, M. (2005). Macromolecules, 38, 8991-8995.
13. Lee, B., Park, Y.-H., Hwang, Y.-T., Oh, W., Yoon, J. & Ree, M. (2005). Nat. Mater. 4, 147-150.
14. Lee, B., Shin, T. J., Lee, S. W., Yoon, J., Kim, J. & Ree, M. (2004). Macromolecules, 37, 4174-4184.
15. Lee, B., Yoon, J., Oh, W., Hwang, Y., Heo, K., Jin, K. S., Kim, J., Kim, K.-W. & Ree, M. (2005). Macromolecules, 38, 3395-3405.
16. Lev, O., Tsionsky, M., Rabinovich, L., Glezer, V., Sampath, S., Pankratov, I. & Gun, J. (1995). Anal. Chem. 67, 22-30.
17. Morais, T. D. de, Chaput, F., Bailot, J.-P., Lahlil, K., Darracq, B. & Levy, Y. (1999). Adv. Mater. 11, 107-112.
18. Névot, L. & Croce, P. (1980). Rev. Phys. Appl. 15, 761-769.
19. Oh, W., Hwang, Y.-T., Park, Y. H., Ree, M., Chu, S.-H., Char, K., Lee, J.-K. & Kim, S. Y. (2003). Polymer, 44, 2519-2527.
20. Parratt, L. G. (1954). Phys. Rev. 95, 359-369.
21. Ree, M. & Ko, I. S. (2005). Phys. High Tech. (Korea), 14, 2-7.
22. Ree, M., Yoon, J. & Heo, K. (2006). J. Mater. Chem. 16, 685-697.
23. Rottman, C., Grader, G., DeHazan, Y., Melchior, S. & Avnir, D. (1999). J. Am. Chem. Soc. 121, 8533-8543.
24. Shin, Y. C., Choi, K.-Y., Jin, M. Y., Hong, S.-K., Cho, D., Chang, T. & Ree, M. (2001). Korea Polym. J. 9, 100-106.
25. Smaihi, M., Jermoumi, T., Marignan, J. & Noble, R. D. (1996). J. Membr. Sci. 116, 211-220.