메뉴 건너뛰기




Volumn 275, Issue 1, 2007, Pages 144-155

Uncertainty analysis of temporal phase-stepping algorithms for interferometry

Author keywords

Laser interferometry; Phase shifting; Uncertainty analysis

Indexed keywords

ALGORITHMS; LASER INTERFEROMETRY; MONTE CARLO METHODS; PHASE SHIFT; PIEZOELECTRIC TRANSDUCERS; UNCERTAINTY ANALYSIS;

EID: 34248190706     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optcom.2007.02.057     Document Type: Article
Times cited : (37)

References (37)
  • 12
    • 84916302381 scopus 로고
    • Review of phase-measuring interferometry in optical testing and metrology III: recent advances in industrial optical inspection
    • Stahl H.P. Review of phase-measuring interferometry in optical testing and metrology III: recent advances in industrial optical inspection. Proc SPIE 1332 (1991) 704
    • (1991) Proc SPIE , vol.1332 , pp. 704
    • Stahl, H.P.1
  • 28
    • 34248226799 scopus 로고    scopus 로고
    • ISO Guide to the Expression of Uncertainty in Measurement, Supplement 1: Numerical Methods for the Propagation of Distributions, ISO, Geneva, 2004, p. 38.
  • 31
    • 34248186464 scopus 로고    scopus 로고
    • ISO 1993, Guide to the Expression of Uncertainty in Measurement, ISO, Geneva, p. 101.
  • 37
    • 5544247138 scopus 로고
    • Malacara D. (Ed), Wiley, New-York
    • Bruning J.H. In: Malacara D. (Ed). Optical Shop Testing (1987), Wiley, New-York 414
    • (1987) Optical Shop Testing , pp. 414
    • Bruning, J.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.