Numerical simulations of vibration in phase–shifting interferometry

Applied Optics

Volumn 35, Issue 13, 1996, Pages 2172-2178

  De Groot, Peter J ^a   Deck, Leslie L ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001670199     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.002172     Document Type: Article

References (10)

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10. P. de Groot, “Long-wavelength laser diode interferometer for surface flatness measurement,” in Optical Measurements and Sensors for the Process Industries, C. Gorecki, and R. W. Preater, eds., Proc. Soc. Photo-Opt. Instrum. Eng. 2248, 136-140 (1994).