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Volumn 31, Issue 5, 1999, Pages 381-400

Error-compensating algorithms in phase-shifting interferometry: A comparison by error analysis

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ERROR ANALYSIS; ERROR COMPENSATION; HARMONIC ANALYSIS; MATHEMATICAL MODELS; PHASE SHIFT; POLYNOMIALS;

EID: 0343568429     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(99)00017-2     Document Type: Article
Times cited : (40)

References (15)
  • 1
    • 77956978378 scopus 로고
    • Phase measurement interferometry techniques
    • In: Wolf E, editor. New York: Elsevier, [Chapter 5]
    • Creath K. Phase measurement interferometry techniques. In: Wolf E, editor. Progress in Optics, vol. 26. New York: Elsevier, 1988. p. 349-383 [Chapter 5].
    • (1988) Progress in Optics , vol.26 , pp. 349-383
    • Creath, K.1
  • 2
    • 77956979212 scopus 로고
    • Advanced evaluation techniques in interferometry
    • In: Wolf E, New York: Elsevier, [Chapter 4]
    • Schwider J. Advanced evaluation techniques in interferometry. In: Wolf E, Progress in Optics, vol. 28. New York: Elsevier, 1990. p. 271-359 [Chapter 4].
    • (1990) Progress in Optics , vol.28 , pp. 271-359
    • Schwider, J.1
  • 3
    • 84971649875 scopus 로고
    • Fourier description of digital phase measuring interferometry
    • Freischlad K., Koliopoulos C.L. Fourier description of digital phase measuring interferometry. J Opt Soc Am A. 7(4):1990;542-551.
    • (1990) J Opt Soc Am a , vol.7 , Issue.4 , pp. 542-551
    • Freischlad, K.1    Koliopoulos, C.L.2
  • 4
    • 84893997835 scopus 로고
    • Design and assessment of symmetrical phase-shifting algorithm
    • Larkin G., Oreb B.F. Design and assessment of symmetrical phase-shifting algorithm. J Opt Soc Am A. 9(10):1992;1740-1748.
    • (1992) J Opt Soc Am a , vol.9 , Issue.10 , pp. 1740-1748
    • Larkin, G.1    Oreb, B.F.2
  • 5
    • 0001009145 scopus 로고
    • Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry
    • Schmit J., Creath K. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry. Appl Opt. 34(19):1995;3610-3619.
    • (1995) Appl Opt , vol.34 , Issue.19 , pp. 3610-3619
    • Schmit, J.1    Creath, K.2
  • 6
    • 77955701859 scopus 로고
    • Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window
    • de Groot P. Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window. Appl Opt. 34(22):1995;4723-4730.
    • (1995) Appl Opt , vol.34 , Issue.22 , pp. 4723-4730
    • De Groot, P.1
  • 7
    • 0029288253 scopus 로고
    • Phase shifting for nonsinusoidal waveforms with phase-shift errors
    • Hibino K., Oreb B.F., Farrant D.I., Larkin K.G. Phase shifting for nonsinusoidal waveforms with phase-shift errors. J Opt Soc Am A. 12(4):1995;761-768.
    • (1995) J Opt Soc Am a , vol.12 , Issue.4 , pp. 761-768
    • Hibino, K.1    Oreb, B.F.2    Farrant, D.I.3    Larkin, K.G.4
  • 8
    • 0002128002 scopus 로고    scopus 로고
    • Design of algorithms for phase measurements by the use of phase stepping
    • Surrel Y. Design of algorithms for phase measurements by the use of phase stepping. Appl Opt. 35(1):1996;51-60.
    • (1996) Appl Opt , vol.35 , Issue.1 , pp. 51-60
    • Surrel, Y.1
  • 9
    • 0001767220 scopus 로고    scopus 로고
    • Window function influence on phase error in phase-shifting algorithms
    • Schmit J., Creath K. Window function influence on phase error in phase-shifting algorithms. Appl Opt. 35(28):1996;5642-5649.
    • (1996) Appl Opt , vol.35 , Issue.28 , pp. 5642-5649
    • Schmit, J.1    Creath, K.2
  • 10
    • 0031120975 scopus 로고    scopus 로고
    • Phase-shifting algorithms for nonlinear and spatial nonuniform phase shifts
    • Hibino K., Oreb B.F., Farrant D.I., Larkin K.G. Phase-shifting algorithms for nonlinear and spatial nonuniform phase shifts. J Opt Soc Am A. 14(4):1997;918-930.
    • (1997) J Opt Soc Am a , vol.14 , Issue.4 , pp. 918-930
    • Hibino, K.1    Oreb, B.F.2    Farrant, D.I.3    Larkin, K.G.4
  • 11
    • 0000200320 scopus 로고    scopus 로고
    • General methods for generating phase-shifting interferometry algorithms
    • Phillion D.W. General methods for generating phase-shifting interferometry algorithms. Appl Opt. 36(31):1997;8098-8115.
    • (1997) Appl Opt , vol.36 , Issue.31 , pp. 8098-8115
    • Phillion, D.W.1
  • 12
    • 0020844269 scopus 로고
    • Digital wave-front measuring interferometry: Some systematic error sources
    • Schwider J., Burow R., Elssner K.-E., Grzanna J., Spolaczyk R., Merkel K. Digital wave-front measuring interferometry: some systematic error sources. Appl Opt. 22(21):1983;3421-3432.
    • (1983) Appl Opt , vol.22 , Issue.21 , pp. 3421-3432
    • Schwider, J.1    Burow, R.2    Elssner, K.-E.3    Grzanna, J.4    Spolaczyk, R.5    Merkel, K.6
  • 13
    • 0027652424 scopus 로고
    • New compensating four-phase algorithm for phase-shift interferometry
    • Schwider J., Falkenstorfer O., Schreiber H., Zoller A., Streibl N. New compensating four-phase algorithm for phase-shift interferometry. Opt Eng. 32(8):1993;1883-1885.
    • (1993) Opt Eng , vol.32 , Issue.8 , pp. 1883-1885
    • Schwider, J.1    Falkenstorfer, O.2    Schreiber, H.3    Zoller, A.4    Streibl, N.5
  • 14
    • 84975576101 scopus 로고
    • Effect of piezoelectric transducer nonlinearity on phase shift interferometry
    • Ai C., Wyant J.C. Effect of piezoelectric transducer nonlinearity on phase shift interferometry. Appl Opt. 26(6):1987;1112-1116.
    • (1987) Appl Opt , vol.26 , Issue.6 , pp. 1112-1116
    • Ai, C.1    Wyant, J.C.2
  • 15
    • 84975597908 scopus 로고
    • Linear approximation for measurement errors in phase shifting interferometry
    • van Wingerden J., Frankena H.J., Smorenburg C. Linear approximation for measurement errors in phase shifting interferometry. Appl Opt. 30(19):1991;2718-2729.
    • (1991) Appl Opt , vol.30 , Issue.19 , pp. 2718-2729
    • Van Wingerden, J.1    Frankena, H.J.2    Smorenburg, C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.