Binary-collision modeling of ion-induced stress relaxation in cubic BN and amorphous C thin films

Applied Physics Letters

Volumn 90, Issue 18, 2007, Pages

  Abendroth, B ^a   Jager H U ^a   Moller W ^a   Bilek, M ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS FILMS; CUBIC BORON NITRIDE; ION BOMBARDMENT; MOLECULAR DYNAMICS; THIN FILMS;

AMORPHOUS CARBON FILMS; BINARY COLLISION MODELING; ION INDUCED STRESS RELAXATION;

STRESS RELAXATION;

EID: 34247880452     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2734472     Document Type: Article

References (33)

1. L. Hultman, W.-D. Münz, J. Musil, S. Kadlec, I. Petrov, and J. E. Greene, J. Vac. Sci. Technol. A 9, 434 (1991).
2. Y. Lifshitz, S. R. Kasi, and J. W. Rabalais, Phys. Rev. Lett. 62, 1290 (1989).
3. J. Robertson, Diamond Relat. Mater. 2, 984 (1993).
4. M. Weiler, S. Sattel, T. Giessen, K. Jung, H. Ehrhardt, V. S. Veerasamy, and J. Robertson, Phys. Rev. B 53, 1594 (1996).
5. P. Mirkarimi, K. McCarty, and D. Medlin, Mater. Sci. Eng., R. 21, 47 (1997).
6. W. Kulisch and S. Ulrich, Thin Solid Films 423, 183 (2003).
7. C. Fitz, A. Kolitsch, W. Möller, and W. Fukarek, Appl. Phys. Lett. 80, 55 (2002).
8. M. M. M. Bilek, M. Verdon, L. Ryves, T. W. H. Oates, C. T. Ha, and D. R. McKenzie, Thin Solid Films 482, 69 (2005).
9. C. A. Davis, Thin Solid Films 226, 30 (1993).
10. P. Sigmund, in Sputtering by Particle Bombardment, edited by, R. Behrisch, (Springer, Berlin, 1981), Vol. 1, p. 9.
11. H. Windischmann, J. Appl. Phys. 62, 1800 (1987).
12. F. Seitz and J. Koehler, Solid State Phys. 3, 305 (1956).
13. H. Ljuncrantz, L. Hultman, J. E. Sundgren, and L. Karlsson, J. Appl. Phys. 78, 832 (1995).
14. D. H. Lee, S. Fayeulle, K. C. Walter, and M. Nastasi, Nucl. Instrum. Methods Phys. Res. B 148, 216 (1999).
15. S. Mukherjee, F. Prokert, E. Richter, and W. Möller, Thin Solid Films 445, 48 (2003).
16. B. K. Gan, M. M. M. Bilek, D. R. McKenzie, Yang Shi, D. A. Tompset, M. B. Taylor, and D. G. McCulloch, J. Phys. D 16, 1751 (2004).
17. S. H. N. Lim, D. G. McCulloch, M. M. M. Bilek, and D. R. McKenzie, Surf. Coat. Technol. 174, 76 (2003).
18. B. Abendroth, R. Gago, A. Kolitsch, and W. Möller, Thin Solid Films 447, 131 (2004).
19. B. Abendroth, R. Gago, F. Eichhorn, and W. Möller, Appl. Phys. Lett. 85, 5905 (2004).
20. M. M. M. Bilek, D. R. McKenzie, and W. Möller, Surf. Coat. Technol. 186, 21 (2004).
21. M. Nastasi, J. Mayer, and J. Hirvonen, Ion-solid Interactions: Fundamentals and Applications (Cambridge University Press, Cambridge, 1996).
22. J. Ziegler, J. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
23. H.-G. Boyen, P. Widmayer, D. Schwertberger, N. Deyneka, and P. Ziemann, Appl. Phys. Lett. 76, 709 (2000).
24. W. Eckstein, Computer Simulation of Ion-Solid Interactions (Springer, Berlin, 1991).
25. H. U. Jäger and A. Y. Belov, Phys. Rev. B 68, 024201 (2003).
26. A. Y. Belov and H. U. Jäger, Thin Solid Films 482, 74 (2005).
27. D. W. Brenner, Phys. Rev. B 0163-1829 10.1103/PhysRevB.42.9458 42, 9458 (1990); D. W. Brenner, Phys. Rev. B 46, 1948 (1992).
28. D. W. Brenner, Phys. Rev. B 0163-1829 10.1103/PhysRevB.42.9458 42, 9458 (1990); D. W. Brenner, Phys. Rev. B 46, 1948 (1992).
29. W. Möller, B. Abendroth, H.-U. Jäger, and M. Bilek (unpublished).
30. M. M. M. Bilek and D. R. McKenzie, Surf. Coat. Technol. 200, 4645 (2006).
31. S. Eyhusen, I. Gerhards, H. Hofsäss, C. Ronning, M. Blomenhofer, J. Zweck, and M. Seibt, Diamond Relat. Mater. 12, 1877 (2003).
32. T. W. H. Oates, L. Ryves, F. A. Burgmann, B. Abendroth, M. M. M. Bilek, D. R. McKenzie, and D. G. McCulloch, Diamond Relat. Mater. 12, 1395 (2005).
33. I. Petrov, F. Adibi, J. E. Greene, L. Hultman, and J. E. Sundgren, Appl. Phys. Lett. 63, 36 (1993).