Embossing on epoxy thermoset polymer using SiO2 coated nickel template

Materials Science Forum

Volumn 539-543, Issue PART 1, 2007, Pages 968-973

  Byeon, Kyeong Jae ^a   Hong, Sung Hoon ^a   Yang, Ki Yeon ^a   Kim, Deok Kee ^a   Lee, Heon ^a  

^a Korea University   (South Korea)

Author keywords

Embossing lithography; Epoxy resin; Ni template; SAM coating; Thermoset polymer

Indexed keywords

COATINGS; ELECTRON BEAM LITHOGRAPHY; EPOXY RESINS; NICKEL ALLOYS; REACTIVE ION ETCHING; SELF ASSEMBLED MONOLAYERS;

EMBOSSING LITHOGRAPHY; NI TEMPLATE; SAM COATING; THERMOSET POLYMER;

THERMOSETS;

EID: 34247589061     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-428-6.968     Document Type: Conference Paper

References (6)

1. C. Lee, J. Cho, S. Ra, Nanoimprint and Nanoprint Technology, (2005) 21A-6-2
2. L. Lin, Y.T. cheng, C.J. Chiu, Microsystem Technologies Vol 4 (1998) 113-116
3. H. Lee, G. -Y. Jung, Microelectron. Eng., Vol 77, 168-174 (2005)
4. L. J. Heyderman, H. Schift, C. David, B. Ketterer, M. Auf der Maur, J. Gobrecht, Microelectron. Eng., Vol 57-58 (2001) 375-380
5. Sunggook Park, Helmut Schift, Celestino Padeste, Bernhard Schnyder, Rüdiger Kötz and Jens Gobrecht, Microelectron. Eng., Vol 73-74 (2004) 196-201
6. G.Y. Jung, S. Ganapathiappan, X. Li, D.A.A. Ohlberg, D.L. Olynick, Y. Chen, W.M. Tong, R.S. Williams, Appl. Phys. A Vol 78 (2004) 1169.