Embossing lithography on sticky thermost polymer using Ni template

Solid State Phenomena

Volumn 124-126, Issue PART 1, 2007, Pages 147-151

  Byeon, Kyeongjae ^a   Hong, Sunghoon ^a   Yang, Kiyeon ^a   Ra, Seunghyun ^b   Ahn, Jinho ^c   Lee, Heon ^a  

^a Korea University   (South Korea)

^b Samsung Electro Mechanics   (South Korea)

^c Hanyang University   (South Korea)

Author keywords

Anti adhesive layer; Electroforming; Embossing lithography; Epoxy resin; Nickel template; SAM coating; Thermoset polymer

Indexed keywords

COATINGS; ELECTROFORMING; LITHOGRAPHY; NICKEL;

ANTI-ADHESIVE LAYERS; EMBOSSING LITHOGRAPHY; NICKEL TEMPLATES; SAM COATING;

EPOXY RESINS;

EID: 34247558463     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-31-0.147     Document Type: Conference Paper

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