Silicon based light emitters for on-chip optical interconnects

Solid State Phenomena

Volumn 108-109, Issue , 2005, Pages 749-754

  Kittler, M ^a,b   Arguirov, T ^b   Seifert, W ^a,b   Yu, X ^a,b   Reiche, M ^c  

^a IHP   (Germany)

^b BRANDENBURG UNIVERSITY OF TECHNOLOGY   (Germany)

^c MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

Dislocations; EL; Implantation; LED; Luminescence; PL; Si; Wafer bonding

Indexed keywords

DEFECTS; DISLOCATIONS (CRYSTALS); EFFICIENCY; ELECTROLUMINESCENCE; INTEGRATED CIRCUIT INTERCONNECTS; ION IMPLANTATION; LIGHT; LIGHT EMITTING DIODES; LUMINESCENCE; SEMICONDUCTOR JUNCTIONS; SILICON; WAFER BONDING;

DISLOCATION NETWORKS; IMPLANTED SAMPLES; INTERNAL EFFICIENCIES; LINE EMISSIONS; LUMINESCENCE SPECTRUM; MIS-ORIENTATION; ON-CHIP OPTICAL INTERCONNECTS; SILICON-BASED LIGHT EMITTERS;

SILICON WAFERS;

EID: 34247620829     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.108-109.749     Document Type: Conference Paper

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