A microball-bearing-supported linear electrostatic micromotor with benzocyclobutene polymer insulating layers

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 693-696

  Modafe, Alireza ^a   Ghalichechian, Nima ^a   Frey, Alex ^a   Lang, Jeffrey H ^b   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b USA   (United States)

Author keywords

BCB; Benzocyclobutene; Microball bearings; Variable capacitance micromotor

Indexed keywords

BCB; BENZOCYCLOBUTENE; MICRO BALL BEARINGS; VARIABLE-CAPACITANCE MICROMOTOR;

BALL BEARINGS; CAPACITANCE; ELECTRIC ACCIDENTS; MICROELECTROMECHANICAL DEVICES; MOTORS; SEMICONDUCTING SILICON; STATORS;

ELECTROSTATIC DEVICES;

EID: 27544500136     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496511     Document Type: Conference Paper

References (9)

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