Dynamic characterization of a linear variable-capacitance micromotor

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 19-22

  Ghalichechian, Nima ^a   Modafe, Alireza ^a   Frey, Alex ^a   Lang, Jeffery H ^b   Ghodssi, Reza ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITANCE; DIGITAL STORAGE; HIGH SPEED CAMERAS; IMAGE PROCESSING; MICROMOTORS; MICROSYSTEMS; VIDEO CAMERAS;

DYNAMIC BEHAVIORS; DYNAMIC CHARACTERIZATION; HIGH SPEED VIDEO CAMERAS; IMAGE-PROCESSING SOFTWARE; MICRO BALL BEARINGS; POSITION DATA; VARIABLE CAPACITANCES; VARIABLE-CAPACITANCE MICROMOTOR;

SOLID-STATE SENSORS;

EID: 50149114954     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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