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Volumn 42, Issue 3, 2007, Pages 271-276
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The influence of film thickness and process temperature on c-axis orientation of Bi3TiTaO9 thin films
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Author keywords
Bi layered ferroelectrics; Bi3TiTaO9; C orientation; Film stress; Microstructure
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Indexed keywords
ANNEALING;
CRYSTAL ORIENTATION;
DEPOSITION;
FILM THICKNESS;
SILICA;
CHEMICAL SOLUTION DEPOSITION (CSD);
FILM STRESS;
FERROELECTRIC THIN FILMS;
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EID: 34247390052
PISSN: 09280707
EISSN: None
Source Type: Journal
DOI: 10.1007/s10971-006-0202-x Document Type: Article |
Times cited : (2)
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References (18)
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