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Volumn 42, Issue 3, 2007, Pages 271-276

The influence of film thickness and process temperature on c-axis orientation of Bi3TiTaO9 thin films

Author keywords

Bi layered ferroelectrics; Bi3TiTaO9; C orientation; Film stress; Microstructure

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; DEPOSITION; FILM THICKNESS; SILICA;

EID: 34247390052     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10971-006-0202-x     Document Type: Article
Times cited : (2)

References (18)
  • 15
    • 34247348014 scopus 로고    scopus 로고
    • Mechanical Properties of Thin Films, Chap. 9:413
    • Mechanical Properties of Thin Films, Chap. 9:413
  • 16
    • 33751196614 scopus 로고    scopus 로고
    • Xie D, Ren TL, Liu LT (2004) Integ Ferro 65:3- +
    • Xie D, Ren TL, Liu LT (2004) Integ Ferro 65:3- +


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.