Structural and ferroelectric properties of the c-axis oriented SrBi2Ta2O9 thin films deposited by the radio-frequency magnetron sputtering

Applied Physics Letters

Volumn 69, Issue 25, 1996, Pages 3839-3841

  Song, T K ^a   Lee, J K ^a   Jung, H J ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; GRAIN SIZE AND SHAPE; MAGNETRON SPUTTERING; PRESSURE EFFECTS; STRONTIUM COMPOUNDS; SUBSTRATES; THIN FILMS; VAPOR DEPOSITION; X RAY DIFFRACTION ANALYSIS;

ARGON PRESSURE; PHYSICAL VAPOR DEPOSITION; RADIO FREQUENCY MAGNETRON SPUTTERING;

FERROELECTRIC MATERIALS;

EID: 0030413315     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117122     Document Type: Article

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