Dielectric functions, elasto-optical effects, and critical-point parameters of biaxially stressed Si1-yCy alloys on Si (0 0 1)

Semiconductor Science and Technology

Volumn 22, Issue 1, 2007, Pages

  Zollner, Stefan ^a   Liu, J P ^b   Zaumseil, P ^c   Osten, H J ^d   Demkov, A A ^e  

^a FREESCALE SEMICONDUCTOR INC   (United States)

^b Chartered Semiconductor Manufacturing   (Singapore)

^c IHP   (Germany)

^d LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^e UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC PROPERTIES; ELASTICITY; ELLIPSOMETRY; INTERFACES (MATERIALS); OPTICAL PROPERTIES; PHASE TRANSITIONS;

CRITICAL-POINT PARAMETERS; DIELECTRIC FUNCTIONS; ELECTRONIC TRANSPORT; PIEZO-OPTICAL EFFECTS;

SILICON ALLOYS;

EID: 34247270178     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/22/1/S04     Document Type: Article

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