Optical constants and ellipsometric thickness determination of strained Si1-xGex=C layers on Si (100) and related heterostructures

Journal of Applied Physics

Volumn 88, Issue 7, 2000, Pages 4102-4108

  Zollner, Stefan ^a   Hildreth, Jill ^a   Liu, Ran ^a   Zaumseil, P ^b   Weidner, M ^b   Tillack, B ^b  

^a MOTOROLA INC   (United States)

^b IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003105107     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1308070     Document Type: Article

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