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Journal of Materials Science: Materials in Electronics

Volumn 18, Issue 6, 2007, Pages 647-653

Piezoelectric and optical properties of ZnO thin films deposited using various O 2/(Ar+O 2) gas ratios

(4) Kang, Seong Jun a Joung, Yang Hee a Chang, Dong Hoon b Kim, Kyoung Won c

a Chonnam National University (South Korea)

b Inha University (South Korea)

c Hynix Semiconductor Inc (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GAS RATIOS; PNEUMATIC LOADING METHOD (PLM);

CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTALLIZATION; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PIEZOELECTRICITY; REFRACTIVE INDEX; SURFACE ROUGHNESS; ZIRCONIA;

THIN FILMS;

EID: 34247101820 PISSN: 09574522 EISSN: 1573482X Source Type: Journal
DOI: 10.1007/s10854-007-9142-7 Document Type: Article

Times cited : (11)

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