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Applied Surface Science

Volumn 244, Issue 1-4, 2005, Pages 365-368

Deposition and structural properties of piezoelectric ZnO epitaxial film on p-InP (1 0 0) substrate for FBAR

(3) Lee, Jae Joon a Kim, Yong Bae a Yoon, Young Soo a

a Konkuk University (South Korea)

Author keywords

Piezoelectric; Semiconductors substrates; ZnO film

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DEPOSITION; DIFFUSION; ELECTRODES; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; PIEZOELECTRICITY; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ELECTROMECHANICAL PROPERTIES; EPITAXIAL FILMS; SEMICONDUCTOR SUBSTRATES; ZNO FILM;

THIN FILMS;

EID: 15844403847 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2004.09.146 Document Type: Conference Paper

Times cited : (13)

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